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Lee, Jung Yeol,Verboncoeur, John P,Lee, Hae June IOP PUBLISHING 2018 PLASMA SOURCES SCIENCE AND TECHNOLOGY Vol.27 No.4
<P>The transition of electron energy probability functions (EEPFs) through the change of heating mode is an important issue in plasma science. A well-known example is that the increase of gas pressure, which was analyzed in terms of the ratio of the energy relaxation mean free path to the electrode gap distance, changes the EEPF from bi-Maxwellian to Maxwellian or Druyvesteyn. In this study, a new aspect of the temporal decay of kinetic energy during the energy relaxation time is theoretically analyzed and compared with a particle-in-cell Monte Carlo collision simulation of capacitively coupled plasmas. A fully kinetic description of electron transport and collisions shows drastic changes of EEPFs with the variation of the driving frequency due to the heating mode transition.</P>
Plasma Diffusion Along a Fine Tube Positive Column
Guangsup Cho,Jung-Hyun Kim,Jong-Mun Jeong,Ha-Chung Hwang,Dong-Jun Jin,Je-Huan Koo,Eun-Ha Choi,Verboncoeur, J.P.,Han-Sup Uhm IEEE 2009 IEEE transactions on plasma science Vol.37 No.3
<P>The propagation velocity of light emission is observed to be u<SUB>p</SUB> ~0.92 times10<SUP>+5</SUP> m/s along a tube of an inner diameter r<SUB>o</SUB> ~1.5 times10<SUP>-3</SUP> m with an external electrode fluorescent lamp filled with 97% Ne and 3% Ar at a total pressure of 30 torr, a mercury-free lamp without phosphor coating the inside glass wall. The origin of this propagation is shown to be ambipolar diffusion with a plasma diffusion speed of u<SUB>p</SUB> ~ (4.8/r<SUB>o</SUB>)D<SUB>a</SUB> for diffusion coefficient D<SUB>a</SUB> along the positive column. When a high voltage magnitude is applied at the external electrode, a high-density plasma is generated inside the hollow electrode, and the plasma diffuses along the positive column toward the ground electrode.</P>