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음향방출 센서 응용을 위한 결합진동 모드 압전소자의 공진 변위 궤적
정영호,신상훈,류주현,Jeong, Yeong-Ho,Shin, Sang-Hoon,Yoo, Ju-Hyun 한국전기전자재료학회 2013 전기전자재료학회논문지 Vol.26 No.2
In this study, coupled mode piezoelectric devices for AE sensor application with excellent displacement and piezoelectric characteristics were simulated using ATILA FEM program, and then fabricated. Displacements and electromechanical coupling factors of the piezoelectric devices were investigated. The simulation results showed that excellent displacement and electromechanical coupling factor were obtained when the ratio of diameter/thickness was 1.0. The piezoelectric device of ${\Phi}/T$= 1.0 exhibited the optimum values of fr= 406 kHz, displacement= $6.11{\times}10^{-8}[m]$, $k_{eff}$= 0.648. The results show that the coupled vibration mode piezoelectric device is a promising candidate for the application of AE sensor piezoelectric device.