http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
리니어 압전 초음파 모터를 위한 성능분석과 정밀 제어기 설계
김정도(Jeong-Do Kim) 호서대학교 공업기술연구소 2004 공업기술연구 논문집 Vol.23 No.1
The ultrasonic piezo motor is a new type motor that has an excellent perform ance and m any useful features th at electrom agnetic m otors do not have. B ut, it suffers from severe system non-linearities and param eter variations especially during speed control. Therefore, it is difficult to accom plish satisfactory control perform ance by using the conventional P ID controller. In this paper, to achieve the precise control for linear type ultrasonic m otor analyzed response tim e & change w ith a driving tim e. A lso, we propose controller th at com bine ST E P controller and PD controller that have error of /mi about liner type ultrasonic motor.
Precise Contour Motion of XY Stage Driven by Ultrasonic Linear Motors in a High Vacuum Environment
이동진,이선규,김완수 한국정밀공학회 2016 International Journal of Precision Engineering and Vol.17 No.3
This paper presents the effect of a vacuum environment on the precise motion control of an XY stage driven by an ultrasonic linear motor. Hybrid, bolt-clamped Langevin-type (hybrid BLT) ultrasonic linear motors that operate at the resonance frequencies of the third longitudinal and sixth lateral modes were adopted in the XY stage. The vacuum environment affects the friction characteristics of the ultrasonic motor system’s driving elements significantly. In this study, the system was characterized according to the vacuum level in terms of the resonance frequency of the ultrasonic motor, the slope of the NCT curve in the micro-dynamics and macrodynamics regimes, the range of the micro-dynamics, and the range of the dead zone. In accordance with the variations in the resonance frequency, the frequency was adjusted to match the resonance frequencies of the longitudinal and lateral modes using an external inductor. Based on the variations in the dead zone and dynamic characteristics, a control algorithm was designed by continuously employing nominal characteristics trajectory following (NCTF) control, feedforward control, and switching control based on the micro-dynamics and macro-dynamics Ultraprecision level of motion accuracy was achieved by the developed system in a high vacuum environment.
$L_14-$B_4$샌드위치형 진동자를 이용한 선형 초음파 모터의 설계 및 특성
김태열,김범진,박태곤,김명호,Kenji Uchino 한국전기전자재료학회 2000 전기전자재료학회논문지 Vol.13 No.12
An ultrasonic linear motors consist of a slider and an ultrasonic vibrator which generates an elliptical oscillations. The ultrasonic linear motors mainly consist of an ultrasonic vibrator which generates elliptical oscillations. The ultrasonic linear motor fabricated in this paper was the use of the 1st longitudinal(L1) and 4th bending vibrations(B4). In order to low driving voltage and improve the life time of the ultrasonic motor, we used stacked piezoceramics. Stacked piezoceramics are adhered to aluminum elastic material. The finite element method was used to optimize dimension of ultrasonic vibrator and direction of vibratory displacement. As a result of estimating the characteristics of the ultrasonic linear motor, no-load velocity was 0.204[m/s] when applied voltage was 70[ $V_{rms}$] in resonance frequency.y.
Analysis of Ultrasonic Linear Motor Using the Finite Element Method and Equivalent Circuit
Park, Jong-Seok,Joo, Hyun-Woo,Lee, Chang-Hwan,Jung, Hyun-Kyo The Korean Institute of Electrical Engineers 2003 KIEE International Transactions on Electrical Mach Vol.b3 No.4
In this paper, a three-dimensional finite element method and construction of equivalent-circuit for a linear ultrasonic motor are presented. The validity of three-dimensional finite element routine in this paper is experimentally confirmed by analyzing impedance of a piezoelectric transducer. Using this confirmed finite element routine, impedance and vibration mode of a linear ultrasonic motor are calculated. Elliptical motion of contact point between vibrator and rail of the linear ultrasonic motor is shown for determination of contact points. By using the finite element method and analytic equations, characteristics of the linear ultrasonic motor, such as thrust force, speed, losses, powers and efficiency, are calculated. The results are confirmed by experiment. Finally, equivalent circuit parameters of the linear ultrasonic motor are obtained using the three-dimensional finite element method and analytic equations.
적층형 압전 액츄에이터를 이용한 L1-B4형 선형 초음파 리니어 모터의 타원변위궤적
이갑수,류주현,황은상,박덕원,Lee, Kab-Soo,Yoo, Ju-Hyun,Hwang, Eun-Sang,Park, Durk-Won 한국전기전자재료학회 2008 전기전자재료학회논문지 Vol.21 No.1
In this study, multilayer structured ultrasonic linear motor was simulated using Atila for investigating its optimum driving conditions. The ultrasonic linear motors mainly consist of an ultrasonic vibrator to generate elliptical displacement. The ultrasonic linear motor simulated in this paper was the use of the 1st longitudinal(Ll) and 4th bending vibrations (B4). Whit the increase of the number of piezoelectric actuator layers, displacement of node was increased. Maximum total displacement of node was about $3,91{\mu}m$ at the 13 layered ultrasonic motor under 5 V.
이동균,한득영,윤석진 한국세라믹학회 2003 한국세라믹학회지 Vol.40 No.10
본 논문에서는 고정민 위치제어가 가능한 선형초음과 모터를 설계 및 제작하였다. 제안된 선형 초음파 모터의 발파장 진동자에 진계(Usinwt, Ucoswt)를 인가했을때 진동법의 불출부에서 발생하는 타원궤직은 이동자를 구동시킨다. 제작된 선형 초음파 모터의 면위궤적은 시뮬레이션 결과와 일치했으며, 압차력이 50 N일 때 이동자에서 발생하는 최대 힘은 9 N, 최대속도는 0.9 ㎧이고 20 N일 때 최대 힘은 2.4 N, 최대 속도는 0.38 ㎧의 특성을 나타냈다. A novel linear ultrasonic motor for precision position control was designed and fabricated. It was composed of two piezoelectric actuators with longitudinal ultrasonic fluctuations and shaking beam. When two AC electric fields (Usinwt, Ucoswt) were applied to piezoelectric actuators respectively, the middle part of shaking beam had an elliptical trajectory. According to experimental results, the generative force was proportional to pre-load force but the speed of slider was in inverse proportion. And the bar of shaking beam had a same trajectory with simulation result.
2개의 란쥬반형 압전 진동자를 이용한 초음파 리니어 모터의 설계와 유한요소해석
최명일,박태곤,정현호,이재형,정영호 한국전기전자재료학회 2003 전기전자재료학회논문지 Vol.16 No.8
Transducer for ultrasonic linear motor with symmetric and anti- symmetric modes was studied. The ultrasonic linear motor consists of two Langevin type piezoelectric vibrators that cross at right angles with each other in tip. In order to excite symmetric and anti-symmetric modes, the transducer must have a phase shift of 90 degree in space and time. As a result, the tip of transducer moves on an elliptical motion. In this paper, the finite element analysis was used to optimize dimension and displacement of the transducer.
고진공 환경중 고출력 초음파 모터 이송 스테이지의 나노미터 위치 제어
김완수(Wan-Soo Kim),이동진(Dong-Jin Lee),이선규(Sun-Kyu Lee) 대한기계학회 2010 大韓機械學會論文集A Vol.34 No.11
본 연구는 고진공 환경중 초음파 리니어 스테이지의 나노미터 위치제어를 기술하고 있다. 고진공 환경 중 초정밀 위치 제어 시스템에 응용하기 위해 3 차 종진동 모드와 6 차 횡진동 모드를 가지는 BLT를 개발 했다. 안정적인 고출력을 위해 BLT 는 하나의 공진 주파수로 두 개의 모드 진동을 발생 시켜야한다. 하나의 공진 주파수를 이용 하기 위해 어드미턴스를 변화시켜 각 모드의 공진 주파수를 일치시켜 조건이 다른 대기 환경에서 안정적인 고출력을 얻을 수 있었다. 기압 변화에 따라 구동 특성이 달라지는 시스템을 제어하기 위해 마찰력 변화에 따른 비선형 특성을 보상한 NCTF 제어를 사용했다. 설계된 제어기를 이용해 고진공 환경에서 시스템을 나노미터 정도로 제어하는 결과를 얻을 수 있었다. In this paper, the ultraprecision positioning control of an ultrasonic linear motor in a high-vacuum environment is presented. The bolt-clamped Langivin type transducer (BLT) with the 3rd longitudinal; and 6th lateral vibration modes was developed, which was excited by using the Eigen resonance frequency for two vibration modes in order to generate stable and high power. In practical applications, however, even if a geometrical design has an Eigen frequency, discordance between both mode frequencies can be generated by the contact mechanism and because of manufacturing errors as well as environmental factors. Both mode frequencies were precisely matched by adjusting the impedence. By using this method, the BLT can be driven under any environmental conditions. The nominal characteristic trajectory following(NCTF) control method was adopted to control the positioning of the system in vacuum. The developed linear motor stage show high positioning accuracy with 5 ㎚.