ULSI 금속배선용 구리의 전착

이동녕,김기범,최창희,이효종,민석홍 대한금속재료학회(대한금속학회) 1998 대한금속·재료학회지 Vol.36 No.10

The microstructural evolution of Cu films deposited by electroplating was investigated with the variation of the deposition rate from 0.1 ㎛/min to 3 ㎛/min by using a copper sulfate solution. Electrodeposition of copper was conducted on 0.1 ㎛ or 0.5 ㎛ thick copper seed layer deposited by sputtering process. The growth characteristics were investigated by monitoring the surface microstructure, electrical resistivity and chemical composition. The feasibility of electroplating process for ultra-large-scale integration(ULSI) metallization scheme was demonstrated through preferred crystallographic growth direction, resistivity and step coverage. The uniform Cu film was successfully electroplated at deposition rates from 0.5 to 3 ㎛/min and its continuous growth on the copper seed layer was observed in every specimen. The resistivity of as-deposited copper film made at deposition rates from 0.5 to 3 ㎛/min was about 2.5μΩ-㎝ and subsequent annealing in a vacuum at 200℃ for 2 min reduced it to 2.3μΩ-㎝.

産後 諸般 症狀에 對한 臨床的 考察

嚴殷奭,李東寧,林垠美 대한한의학회 부인과학회 2001 大韓韓方婦人科學會誌 Vol.14 No.1

The purpose of this study is to investigate the various postpartum symptoms, and provide fundamental data about postpartum health care. The subjects of the present study were 148 women (74 women who completed vaginal delivery and 74 women who delivered by cesarean section) who completed labor between January 1 and June 30, 1999, at the department of OB & GYN in Dong-Inchon Gil Hospital. We investigated the various symptoms which occurred from the moment of hospital discharge to 5 months after parturition, and examined the frequency of symptoms. Then we systemically classified the symptoms. Next, we subdivided the major categories of symptoms. After that, we classified the symptoms by the age of patients, the obstetric history of patients, and the method of delivery. Finally we compared the symptoms of these results and the standard textbook (Textbook of Oriental Gynecology edited by Byoung-Key Song, 1994). The results of this investigation were summarized as follows: 1. Systemic classification of various postpartum symptoms: (1) Nervous and psychiatric symptoms accounted for 14.2% of the postpartum symptoms; (2) circulatory symptoms, for 23.7%; (3) respiratory symptoms, for 7%; (4) gastrointestinal symptoms, for 10%; (5) musculoskeletal symptoms, for 7.3% of which waist and hip joint accounted for 33% of the arthralgia; knee joint, for 25%; wrist joint, for 13.7%; (6) urinary symptoms, for 2.7%; (7) reproductive symptoms, for 23.3%; (8) the rest, for 11.8%. 2. Subdivision the major categories of various postpartum symptoms: (1) Discomfort at the incision site accounted for 92.6% of the 148 women; (2) increase of sweating, for 77%; (3) arthralgia, for 66.9%; (4) common cold, for 63.5%; (5) hair loss, for 62.2%; (6) dizziness, for 52.7%; (7) depression, for 47.3%; (8) toothache, for 43.2%; (9) coldness of the extremities and lower abdomen, for 37.8%; (10) edema, for 37.2%. 3. There were no remarkable differences in the frequency of symptoms according to the age of patients, the obstetric history of patients, and the method of delivery. 4. We observed some symptoms not mentioned in the textbook. On the other hand, we did not observe some of the textbook symptoms. Thus, if we continue investigation about various postpartum symptoms by other methods (incidence duration, symptoms' degree, etc) and compare with the textbook, we can update the textbook. There will be significant data which are helpful for diagnosis and oriental medical treatment of the patient after parturition.

Crystallization Texture of Amorphous Silicon Deposits on Glass Substrates (초)

( Dong Nyung Lee ) 대한금속재료학회 ( 구 대한금속학회 ) 2007 대한금속재료학회 학술대회 개요집 Vol.2007 No.1

Annealing textures of nanocrystalline metallic deposits

Lee Dong-Nyung 한국분말야금학회 2004 한국분말야금학회 학술대회논문집 Vol.2004 No.1

The Effect of Precipitation on the Evolution of Recrystallization Textures in an AA 8011 Aluminum Alloy Sheet

Lee, Dong Nyung,Ryu, Jong Ho,Lee, Yoon Soo 대한금속재료학회(대한금속학회) 2001 METALS AND MATERIALS International Vol.7 No.3

The texture of an AA 8011 aluminum alloy sheet cold rolled by 95% showed a typical β-fiber, which runs from the copper orientation [C={112}$lt;111$gt;] over S [{123}$lt;634$gt;] to brass [B={011}$lt;112$gt;]. The development of annealing textures depended on annealing temperatures due to the interaction between precipitation and recrystallization. Upon annealing at a low temperature of 275℃, precipitation took place before recrystallization. This led to a weak recrystallization texture consisting of {011}$lt;122$gt;, {001}$lt;100$gt;, and {hk0}$lt;001$gt;, among which the {011}$lt;122$gt; orientation developed near large FeAl₃ particles as the main orientation and the cube [{001}$lt;100$gt;] orientation originating from the matrix was relatively weak. After annealing at 350 and 500℃, a strong cube texture developed along with a weak {011}$lt;122$gt; orientation. When the cube orientation developed, the copper orientation disappeared most rapidly. These results were discussed based on the interaction between precipitation and recrystallization.

Frequency Characteristics of Anodic Oxide Films on Tantalum

Lee, Dong-Nyung,Yoon, yong-Ku Korean Nuclear Society 1973 Nuclear Engineering and Technology Vol.5 No.1

The Nishitani's equations for impedance of anodic oxide films have been derived based on a p-i-n model under the assumption of $\omega$$\varepsilon$$\rho$$_{ο}$<<4$\pi$<<$\omega$$\varepsilon$$\rho$$_{\omega}$, where $\omega$ is angular frequency, $\varepsilon$ is dielectric constant, and $\rho$$_{ο}$ and $\rho$$_{\omega}$ are the resistivity of the interface region and the intrisic region of the anodic oxide film, respectively. Since it is not possible to evaluate all parameters in the equations, however, any clear physical picture cannot be obtained from the equations. Therefore, the equations are modified under the assumption of $\omega$$\tau$$_{\omega}$>>1 and In(1+$\omega$$^2$$\tau$$_{ο}$$^2$)<<1, where $\tau$$_{\omega}$=$\varepsilon$$\rho$$_{\omega}$(4$\pi$) and $\tau$$_{ο}$=$\varepsilon$$\rho$$_{ο}$/(4$\pi$). The modified equations are then used to explain the change in the frequency characteristics of anodic oxide films when they are heated. The change in impedance of anodic oxide films when they are heated is attributed mainly to the increase in the diffusion layer and to the decrease in the resistivity of anodic oxide films.s.

Plastic / Superplastic Forming : DEFORMATION OF POROUS METALS

Dong Nyung Lee 대한금속재료학회 ( 구 대한금속학회 ) 1995 Advanced Material and Processing Vol.1 No.-

The Deposition and Reerystallization Textures of Copper Electrodeposits Obtained from a Copper Cyanide Bath

Lee, Dong Nyung,Yang, Jeom Sik 대한금속재료학회(대한금속학회) 1999 METALS AND MATERIALS International Vol.5 No.5

The textures of copper electrodeposits obtained from an alkaline copper cyanide bath changed from $lt;110$gt; to $lt;111$gt; with increasing cathode current density and with decreasing bath temperature. The $lt;111$gt; and $lt;110$gt; textures of copper electrodeposits changed to the $lt;100$gt; and $lt;√310$gt; textures, respectively, when they were recrystallized. These results are similar to those in copper electrodeposits obtained from acid copper sulfate and acid copper fluoborate baths.

Strain Energy Release Maximization Model for Recrystallization Textures

Lee, Dong Nyung 대한금속재료학회(대한금속학회) 1999 METALS AND MATERIALS International Vol.5 No.5

In 1995, the author advanced a model for the evolution of recrystallization texture. In the model the absolute maximum internal stress direction due to dislocations generated during deformation or fabrication in the fabricated material is aligned with the minimum Young's modulus direction in recrystallized grains, whereby the energy release during recrystallization can be maximized. This comes from the fact that material concerned does not change macroscopically its shape and volume during recrystallization, and so the recrystallization is a displacement controlled process. This strain energy release maximization model originates from the presumption that the stored energy due to dislocations is the major driving force for the recrystallization. The absolute maximum internal stress direction may be obtained from the operating slip systems, which are related to the deformation mode and texture. If one slip system is activated, the absolute maximum normal stress direction is parallel to the slip direction, or the Burgers vector direction. If more than one slip system is activated, the absolute maximum normal stress direction can be determined by the vector sum of related slip directions, taking their contribution to slip into account. This paper discusses recrystallization textures of plastically deformed and electrodeposited metals, based on the model. A brief comment was made also on the growth textures of axisymmetrically deformed copper and silver and electrodeposited silver and Fe-Ni alloy.

The Evolution of Recrystallization Textures in Plastically Deformed Face Centered Cubic Metals

Lee, Dong Nyung,Jeong, Hyo Tae,Shin, Hyung Joon 대한금속재료학회(대한금속학회) 1998 METALS AND MATERIALS International Vol.4 No.3

The recrystallization texture of axisymmetrically deformed fcc metals having major $lt;111$gt; + minor $lt;100$gt; fibers and major $lt;100$gt; + minor $lt;111$gt; fibers is the $lt;100$gt; orientation. The evolution of the {100}$lt;001$gt; recrystallization texture from the {112}$lt;111$gt; deformation texture and near {031}$lt;20 1 3$gt; recrystallization texture from plane strain compressed bicrystal {123}$lt;412$gt; and the recrystallization texture of axisymmetrically deformed fcc metals have been discussed based on the energy release maximization theory in which the absolute maximum stress direction in deformed state becomes parallel to the minimum Young's modulus direction after recrystallization.