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ECR-MOCVD에 의해 연성 고분자 기판에 제조된 구리막의 균일도에 전극의 형태가 미치는 영향
전법주,이중기 한국군사과학기술학회 2004 한국군사과학기술학회지 Vol.7 No.1
Copper films were prepared by using ECR-MOCVD(Electron Cyclotron Resonance Metal Organic Chemical Vapor Deposition) coupled with a DC bias system. The DC bias is connected to the electrode which placed 1∼3cm above the polymer substrate. The pulse electrical field around the electrode attracts the positive charged copper ions generated from the dissociation of copper precursor, $Cu(hfac)_2$, under ECR plasma. Condensation of supersaturated copper ions in the space between the electrode and substrate, makes it possible to deposit copper film on the polymer substrate even at room temperature. In this study, optimization of the electrode configuration was carried out in order to obtain the uniform films. The uniformity of the deposited films were closely related to the parameters of electrode geometry such as electrode shape, thickness, grid size and the spacing between electrodes. The most uniform copper film was observed with the electrode that enabled uniform electrical field distribution across the whole dimension of electrode.
Control of Optical Properties by the Stepwise Chemical and Plasma Spray Treatment of Polycarbonate
전법주 한국진공학회 2018 Applied Science and Convergence Technology Vol.27 No.6
Using the Polycarbonate (PC) polymer sheet, the change in optical properties was compared by changing the surface shape with the primary chemical surface treatment and plasma spray treatment. Plasma treatment affects surface composition changes and has a small effect on surface structure changes. Changes in surface structure are important to control the optical characteristics of the PC polymer sheet. Thus, it was possible to control changes in surface composition and changes in surface structure through secondary plasma treatment after primary chemical treatment. The primary chemical treatment had a small effect on changes in the chemical composition of the surface, but the surface roughness was influenced by swelling. The secondary plasma spray treatment affected optical properties changes, which allowed control of changes in surface structure after primary chemical treatment. At the same time after the first chemical treatment, the secondary plasma treatment was easy to control of optical properties by changing the surface structure as well as the surface properties due to changes in chemical composition by surface cross-linking reaction.
γ-Alumina에 담지된 산화구리에 의한 SO<sub>2</sub>의 제거에 관한 수치모사
전법주,홍인권,박경애,정일현,Jeon, Bup Ju,Hong, In Kwon,Park, Kyung Ai,Jung, Il Hyun 한국공업화학회 1994 공업화학 Vol.5 No.3
세공분포가 서로 다른 두 종류(KHT, X-5)의 ${\gamma}$-알루미나 pellet에 아황산가스를 흡착 제거시킬 경우 반응이 진행되면서 각각의 세공벽에 반응생성층이 형성되어 반응속도 상수($K_v$), 세공률(${\varepsilon}_p$), 유효내부 확산계수($D_e$)의 변화와 세공반경이 줄어들어 세공막힘 현상이 일어나게 된다. 이들 영향을 고려하여 세공분포를 이용한 Random pore model로 최적반응온도 $450^{\circ}C$에서 산화구리의 각 담지농도(4, 6, 8, l0 wt%)와 아황산가스의 농도(1000, 2000ppm)에 대한 전환율을 수학적 모델로부터 계산하였다. 산화구리의 담지농도가 증가할수록 세공내의 유효반응 표면적과 세공률의 감소, 내부확산저항의 증가, 미세세공의 세공막힘 현상으로 전환율은 감소하였다. 총괄 전환율은 ${\gamma}$-알루미나 pallet의 표면 국부 전환율에 크게 의존하였으며 산화구리의 담지농도가 낮고 아황산가스의 농도가 클수록 증가하였다. 반응기에 유입되는 아황산가스의 유속은 반응초기 CuO의 전환율에 영향을 주었고 세공분포가 발달하여 세공율이 큰 ${\gamma}$-알루미나 pellet일수록 전환율은 높게 나타났다. Numerical solutions were obtained to the model equations for various of the parameters characterizing the pore structure, effective internal diffusion, and the chemical reaction constant. The conversion was decreased with the cause of pore closure at the surface of reacting particles, reduction of porosity, surface area of reaction and effective diffusion coefficient in the solid with the progress of reaction. Total conversion was strongly dependent on the local conversion at surface. According to the decreasing of impregnated concentration of the copper oxide and the increase of the flue gases concentration, total conversion was increased. The conversion was affected by gas flow rate and pore size distribution in the reacting solid.
E 발표장: 첨단신소재 3 : E-34 ; ECR-MOCVD에 의해 고분자 필름에 증착된 투명주석산화막의 특성에 관한 DC bias의 영향
전법주,이중기,김연석 한국화학공학회 2007 화학공학의이론과응용 Vol.10 No.2
The effects of direct current(DC) bias, including the various bias voltage, frequency, waveforms and duty on the characteristics of the deposited tin oxide thin film on polymer substrate were investigated. The tinoxide films were prepared under the room temperature by the electron cyclotron resonance chemical vapor deposition(ECRCVD) coupled with a DC bias system. In order to induce ion on the non-conductive polymer substrate, the pulse DC bias was applied to the stainless steel electrode above the substrate. The precursor TMT (tetra methyl tin) was used as an organometallic source and polyethylene terephthalate(PET) film was employed as substrate. The surface resistivity of the deposited film was determined by the four-point probe measurements. The optical transmittance in a visible region were observed by UV-spectrophotometer. In our results, DC bias voltage, frequency, waveforms and duty applied around the substrate strongly affected the surface resistivity and surface morphology of deposited film. The tinoxide films with good transparent property can be prepared by ECR-MOCVD coupled with a DC bias system.
γ- Alumina 에 담지된 산화구리에 의한 SO2 의 제거에 관한 수치모사
전법주,홍인권,박경애,정일현 ( Bup Ju Jeon,In Kwon Hong,Kyung Ai Park,Il Hyun Jung ) 한국공업화학회 1994 공업화학 Vol.5 No.3
세공분포가 서로 다른 두 종류(KHT, X-5)의 γ-알루미나 pellet에 아황산가스를 흡착 제거시킬 경우 반응이 진행되면서 각각의 세공벽에 반응생성층이 형성되어 반응속도 상수(K_v), 세공률(ε_p), 유효내부 확산계수(D_e)의 변화와 세공반경이 줄어들어 세공막힘 현상이 일어나게 된다. 이들 영향을 고려하여 세공분포를 이용한 Random pore model로 최적반응온도 450℃에서 산화구리의 각 담지농도(4, 6, 8, 10wt%)와 아황산가스의 농도(1000, 2000ppm)에 대한 전환율을 수학적 모델로부터 계산하였다. 산화구리의 담지농도가 증가할수록 세공내의 유효반응 표면적과 세공률의 감소, 내부확산 저항의 증가, 미세세공의 세공막힘 현상으로 전환율은 감소하였다. 총괄 전환율은 γ-알루미나 pellet의 표면 국부 전환율에 크게 의존하였으며 산화구리의 담지농도가 낮고 아황산가스의 농도가 클수록 증가하였다. 반응기에 유입되는 아황산 가스의 유속은 반응초기 CuO의 전환율에 영향을 주었고 세공분포가 발달하여 세공율이 큰 γ-알루미나 pellet일수록 전환율은 높게 나타났다. Numerical solutions were obtained to the model equations for various of the parameters characterizing the pore structure, effective internal diffusion, and the chemical reaction constant. The conversion was decreased with the cause of pore closure at the surface of reacting particles, reduction of porosity, surface area of reaction and effective diffusion coefficient in the solid with the progress of reaction. Total conversion was strongly dependent on the local conversion at surface. According to the decreasing of impregnated concentration of the copper oxide and the increase of the flue gases concentration, total conversion was increased. The conversion was affected by gas flow rate and pore size distribution in the reacting solid.