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이호재,주영훈,박진배 한국지능시스템학회 2005 한국지능시스템학회논문지 Vol.15 No.3
A systematic output-tracking control design technique for robust control of Takagi-Sugeno (T-S) fuzzy systems with norm-bounded uncertainties is developed. The uncertain T-Sfuzzy system is first represented as a set of uncertain local linear systems. The tracking problem is then converted into the stabilization problem for a set of uncertain local linear systems thereby leading to a more feasible controller design procedure. A sufficient condition for robust asymptotic output tracking is derived in terms of a set of linear matrix inequalities. A stability condition on the traversing time-instances is also established. The output tracking control simulation for a flexible-joint robot-arm model is demonstrated, to convincingly show the effectiveness of the proposed system modeling and controller design. 본 논문은 파리미터의 불확실성을 포함하는 Takagi-Sugeno(T-S) 퍼지 시스템을 위한 체계적인 출력 추종 제어기 설계 기법을 제안한다. 불확실 T-S 퍼지 시스템은 효과적인 설계를 위하여 퍼지 입력 공간의 발화도의 우세성에 따르는 몇 개의 불확실 선형 시스템으로 표현된다. 출력 추종 제어 오차는 일반화된 리아푸노프 함수에 의하여 해석된다. 이에 따라 출력 추종 제어기 설계 문제는 몇 개의 불확실 선형 시스템의 안정화 문제로 변환된다. 강인 추종 제어기 설계 조건은 선형 행렬 부등식의 형태로 유도된다. 마지막으로 파라미터 불확실성을 포함하는 혼돈 로렌cm 카오스 시스템의 출력 추종 문제를 고려하여 본 논문에서 제안한 기법의 효용성을 입증한다.
이호재,서동선,Gary S. May,홍상진 대한전자공학회 2013 Journal of semiconductor technology and science Vol.13 No.4
In-situ optical emission spectroscopy (OES)is employed for leak detection in plasma etchingsystem. A misprocessing is reported for significantlyreduced silicon etch rate with chlorine gas, and OESis used as a supplementary sensor to analyze the gasphase species that reside in the process chamber. Potential cause of misprocessing reaches to chamberO-ring wear out, MFC leaks, and/or leak at gasdelivery line, and experiments are performed tofunnel down the potential of the cause. Whilemonitoring the plasma chemistry of the processchamber using OES, the emission trace for nitrogenspecies is observed at the chlorine gas supply. Notrace of nitrogen species is found in other thanchlorine gas supply, and we found that the amount ofchlorine gas is slightly fluctuating. We successfullyfound the root cause of the reported misprocessingwhich may jeopardize the quality of thin filmprocessing. Based on a quantitative analysis of theamount of nitrogen observed in the chamber, weconclude that the source of the leak is the fitting of thechlorine mass flow controller with the amount ofaround 2-5 sccm.
이호재,김도완 제어·로봇·시스템학회 2009 International Journal of Control, Automation, and Vol.7 No.5
This paper addresses robust static output-feedback control problems for a nonlinear system with uncertain fuzzy output in Takagi–Sugeno’s (T–S) form. Two cases of the T–S fuzzy system, both continuous- and discrete-time cases are considered. In both cases, sufficient design conditions are derived for asymptotic stabilization in the sense of Lyapunov, in terms of linear matrix inequalities. Results are extended to retain H∞ disturbance attenuation performance. An illustrative example on the permanent magnet synchronous motor equipped with uncertain nonlinear output and disturbance is provided to illustrate the effectiveness of the proposed methodology.