CMP 패드 두께 프로파일 측정 장치 및 방법에 관한 연구

이태경,김도연,강필식,Lee, Tae-kyung,Kim, Do-Yeon,Kang, Pil-sik 한국산업융합학회 2020 한국산업융합학회 논문집 Vol.23 No.6

The chemical mechanical planarization (CMP) is a process of physically and chemically polishing the semiconductor substrate. The planarization quality of a substrate can be evaluated by the within wafer non-uniformity (WIWNU). In order to improve WIWNU, it is important to manage the pad profile. In this study, a device capable of non-contact measurement of the pad thickness profile was developed. From the measured pad profile, the profile of the pad surface and the groove was extracted using the envelope function, and the pad thickness profile was derived using the difference between each profile. Thickness profiles of various CMP pads were measured using the developed PMS and envelope function. In the case of IC series pads, regardless of the pad wear amount, the envelopes closely follow the pad surface and grooves, making it easy to calculate the pad thickness profile. In the case of the H80 series pad, the pad thickness profile was easy to derive because the pad with a small wear amount did not reveal deep pores on the pad surface. However, the pad with a large wear amount make errors in the lower envelope profile, because there are pores deeper than the grooves. By removing these deep pores through filtering, the pad flatness could be clearly confirmed. Through the developed PMS and the pad thickness profile calculation method using the envelope function, the pad life, the amount of wear and the pad flatness can be easily derived and used for various pad analysis.

흥분제(Psychostimulants)에 대한 신경생물학 측면의 고찰 -Methamphetamine 남용을 중심으로

이태경,존 E 그랜트,김석원,오동열,Lee Tae Kyung,Jon E. Grant,Kim, Suck Won,Oh Dong Yul 대한임상독성학회 2003 대한임상독성학회지 Vol.1 No.1

Methamphetamine (MA) is a major drug of abuse in Korea. Currently preliminary evidence suggests that MA dependence may cause long-term neural damage in human. Repeated exposure to psychostimulants such as methamphetamine results in behavioral sensitization, a paradigm thought to be relevant to drug craving and addiction in human. Sensitization alters neural circuitry involved in normal processes of incentrive, motivation, and reward. However the precise mechanism of this behavioral sensitization has not yet been fully elucidated. Repeated use of high dose MA causes neurotoxicity which is characterized by a long-lasting depletion of striatal dopamine (DA) and tyrosin hydroxylase activity of DA, DA-transporter binding sites in the striatum. The loss of DA transporters correlates with memory problems and lack of motor coordination. DA fuels motivation and pleasure, but it' s also crucial for learning and movement. This selective review provides a summary of studies that assess the neurobiological mechanisms of MA.

Convergence Researches via Molecular/Multiscale Simulations

Tae Kyung Lee(이태경) 한국고분자학회 2023 한국고분자학회 학술대회 연구논문 초록집 Vol.48 No.2

화엄경의 법계연기사상과 컴퓨터세계의 논리적 관계성

이태경 ( Tae Kyung Lee ) 사단법인 한국교수불자연합회 2004 한국교수불자연합학회지 Vol.10 No.-

Computers are now found in every walk of our life. in the office, in the bank, in schools and colleges , in industry, and so on. Nowadays, computer utilization is extended to many areas rapidly and the application is increased more by development of internet technology. If the foundation related to computer on buddhism can be found, computer theory and technique would are devoted toward the more direction to peoples. For the first, I tried to find the logical relationship between the pratitya samutpada theory, so as called, the depending arising theory of dharmadhatu on avatamska Sutra and computer theory. And the paper described on the four dharmadhatu on the avatamska sutra. because of depending arising theory of that is the kernel of avatamska sutra. And then, for the purpose of finding the ability of the logical relationship between two areas, analysed basic theory of computer systems, hardware and software. Also, I studied the harmony and accessability among of the avatamska sutra, real world and computer world. Specially, I noted the bit theory on hardware and described the tree theory on software area each. At all, to represent the importance of the logical relationship I presented the connection of the four dharmadhatu on avatamska sutra and computer theory. As it is, the computer theory can be derived from and described by the four dharmadhatu. Though the computer world is involved in real world and the real world is the virtual world, also the computer world is virtuality. I think that if we had studied about the avatamska sutra very deeply in real world, then would have grown to the beautiful computer world more than now.

친환경 요소 중 공공의 사회적 책임감이 사회경제 가치관에 미치는 영향

이태경(Lee, Tae-Kyung),이정재(Yee, Jurng-Jae),이상홍(Lee, Sang-Hon) 대한건축학회 2013 대한건축학회논문집 Vol.29 No.5

The design, construction, use and demolition of building generate substantial social and economic benefits to society but may also have serious negative impacts especially for the environment. In response to the demand for evaluation and management of buildings’ environmental performance, several tools and methodologies have been developed and are being implemented in the construction sector aiming at sustainable performance. The research work is focusing on environmental management tools emphasizing to rating systems’ analysis, comparison and implementation for buildings’ environmental performance. The LEED, SBT07, CASBEE and KGBC guides for existing buildings and new construction are compared, similarities and differences are analysed and a joint evaluation guide for existing buildings derived as a result of the rating systems’ analysis. Finally all the components for certification are researched by citizens in Korea and analyzed their sustainable preference and impacts of social responsibility on social economy. The results gained by this research suggested an appropriate way to make a more effective certifying plan and weighting factors according to analyze various citizens’ preference of certain certification sectors.

전신성 광택 태선 (苔癬)

이태경(Tae Kyung Lee),문두찬(Doo Chan Moon),권경술(Kyung Sool Kwon),정태안(Tae Ahn Chung) 대한피부과학회 1987 대한피부과학회지 Vol.25 No.5

A 6-year-old boy presented in December 1986 with a 1-year history of a nonpruritic flesh-colored papular eruption that began on the dorsum of left hand and gradually appeared on other areas, such as upper and lower extremities, trunk and external genitalia. Complete blood cell count. urinalysis, VDRL, stool examination, liver function test and chest X-ray were negative or within normal limits. On physical examination, he had uniform, pinhead-sized, flat-topped, shiny, discrete paples on the whole body surface. No oral lesions were found. Histopathologically skin biopsy specimen showed a circumscribed nest of infiltrate consisted of lymphocvtes, histiocytes and a few epitheloid cells. The cell nest was separated frorn the overlying flattened epidermis by a large space. Direct immunofluorescent test was negative. He had been treated with systemic corticosteroid for two months without recurrence until nowadays.

Reiter 증후군

이태경(Tae Kyung Lee),권경술(Kyung Sool Kwon),정태안(Tae Ahn Chung) 대한피부과학회 1986 대한피부과학회지 Vol.24 No.1

We presented a case of Reiters syndrome consisting of conjunctivitis, arthritis, and skin lesions, occurring in 20-year-o1d male. He had neither an episode of dysentery nor a history of sexual exposure before onset of syndrome. The skin lesions had begun with erythernatous scaly patches on the inguinal region and scalp, and later followed by generalized pustular, psoriasiform and/or hyperkeratotic crusted lesions on the erythematous base. Yellowish discoloration and onycholysis of nails and shallow ulcer of glans penis were observed. Arthritis of the knee and shoulder joints were developed, accompanied by pain, swelling, limited motion, wasting and weakness of both lower extremities. In laboratory investigation, urinalysis, stool examination for parasites and occult blood, renal function test, blood VDRL, and X-ray of chest, both knee. joints, shoulder joint and thoracolumbar spine were within normal limit or negative except for leukocytosis(24, 500/mm), increased ESR(90 mm/hr) and hypoalbuminemia(2. 6 g/dl), and he was associated with HLA-A3, A 9, B5, and Rw 49 Histopathologically skin biopsy specimen showed extensive hyperkeratosis, paralceratosis, elongated rete ridges, spongiform macropustule of Kogoj. He was treated effectively with antibiotics, corticosteroid, and methotrexate for two months without recurrence till now.

밸브 구동기 다이아프램 손상사례 및 방지방안 고찰

이태경(Tae Kyung Lee) 한국에너지학회 2022 한국에너지공학회 학술발표회 Vol.2022 No.4

서울지역의 업무상 뇌ㆍ심혈관질환 인정 여부에 영향을 미치는 요인

이태경(Tae-Kyung Lee),김수근(Soo-Geun Kim),원종욱(Jong-Uk Won),장태원(Tae-Won Jang),조성식(Seong-Sik Cho),주영수(Young-Su Ju),권영준(Young-Jun Kwon),임형준(Hyoung-June Im) 대한직업환경의학회 2010 대한직업환경의학회지 Vol.22 No.3

마이크 프리앰프 디지털 에뮬레이션 기술의 재현성에 대한 분석 연구 : Neve 1073 DPX와 1973 Pre Plug-in의 비교 연구를 중심으로

이태경(Lee Tae-Kyung),장민호(Chang Min-Ho) 한국문화융합학회 2020 문화와 융합 Vol.42 No.8

본 논문에서는 기술이 발전됨에 따라 하드웨어로 존재하는 많은 유명한 아날로그 장비들, 특히 들어오는 신호음을 전기적으로 증폭시키면서 특정한 색채를 부여하는 아날로그 프리앰프의 디지털 모델링 기술의 재현성에 대해 연구하여 프리앰프 디지털 모델링 기술의 재현성을 확인하는 데에 초점을 맞춘다. 프리앰프의 특정한 색채를 더하는 기능은 배음의 변화, 즉 고조파 왜곡 현상을 통하여 부여하는 특성이다. 이러한 색채는 각 장비의 회사, 또 모델 종류에 따라 다르다. 분석 대상은 Neve 1073과 동일한 부품들과 스펙으로 제작된 Neve 1073 DPX를 선정, 비교 분석 대상으로는 Neve 1073을 Arturia社에서 복각하여 plug-in 개발한 1973-pre로 선정한다. 연구는 Moog社의 아날로그 신디사이저 ‘Little Phatty Stage 2’에서 추출한 기본파와 충분한 배음들로 구성된 샘플을 동일하게 하드웨어 프리앰프와 이를 복각한 플러그인에 동시 송출 후 동시에 DAW로 녹음하여 도출된 결과를 바탕으로 주파수 응답 및 고조파 왜곡 현상을 확인하여 아날로그 장비와 복각 플러그인의 유사 여부를 통해 그 재현성을 파악하는 형태로 연구를 진행하였다. 연구결과, 1973-pre가 Neve 1073 DPX와 유사한 주파수 응답과 하모닉스를 구현하는 것이 가능하다는 것을 확인하였으며, 하드웨어를 사용하지 않고서도 plug-in이라는 특성을 활용하여 다양한 프로세싱이 가능하다 사료된다. 본 연구를 통해 음악인들에게는 기술적인 정보 전달이, 개발자와 후속 연구자들에게는 프리앰프 디지털 에뮬레이션 기술의 발전을 위한 학문적 자료가 되기를 바란다. The final objective of this research is to confirm the reproducibility of digitally emulated plug-in of hardware(especially the preamp, which is the hardware that boost up the volume of electric signal and impart its tonal character). Tonal character is given by shifting signal’s harmonics, Tonal characters varies in hardwares’ companies, and the models of hardware. Neve 1073 DPX has been set as the research subject(which has built with the same parts and spec of Neve 1073), and Arturia’s 1973-Pre as the comparative subject(which emulates Neve 1073). Research was progressed by comparing frequency response and the amount of harmonic distortion with recorded results(DAW recording) of each hardware preamp and identical hardware preamp emulated plug-in. Little Phatty Stage 2 of Moog was used for the signal sender, and sent signal consists fundamental wave and harmonics. It was possible to confirm that 1973-Pre’s frequency response and the harmonics shifting is similar to the hardware through this research. Since 1973-pre is a software plug-in, it seems that it could be used with various methods without using hardware. We hope this research to give technical information to musicians and to give academic information to engineers and following researchers.