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반도체 식각공정을 위한 비가연성 혼합냉매 줄톰슨 냉동기 설계
이천규,김진만,이정길 한국반도체디스플레이기술학회 2022 반도체디스플레이기술학회지 Vol.21 No.2
A cryogenic Mixed Refrigerant Joule-Thomson refrigeration cycle was designed to be applied to the semiconductor etching process with non-flammable constituents. 3-stage cascade refrigerator, single mixed refrigerant Joule-Thomson refrigerator, and 2-stage cascade type mixed refrigerant Joule-Thomson refrigerator are analyzed to figure out the coefficient of performance. Non-flammable mixture of argon(Ar), tetrafluoromethane(R14), trifluoromethane (R23) and octafluoropropane(R218) were utilized to analyze the refrigeration cycle efficiency. The designed refrigeration cycle was adapted to cool down the coolant of HFE7200(Ethoxy-nonafluorobutane, C4F9OC2H5) with certain constraints. Maximum coefficient of performance of the refrigeration system is obtained as 0.289 for the cooling temperature lower than -100℃. The detailed result of the coefficient of performance according to the mixture composition is discussed in this study.
표준기상 데이터 적용 냉매 직팽식 태양열 히트펌프 성능 분석
이천규,정효재 한국태양에너지학회 2022 한국태양에너지학회 논문집 Vol.42 No.4
Typical meteorological year (TMY) data can be used in various fields and, based on their reliability, in various industrial areas. For example, the operability of a solar-assisted thermal heat pump, which is an integrated system, largely depends on weather conditions. Furthermore, accurate TMY data are essential for the quantitative designing of heating and cooling systems, which use direct climatic heat sources such as solar and air heat. Herein, a rule of thumb for analyzing the system efficiency of a direct expansion solar-assisted heat pump (DXSAHP) with seasonal variation is proposed. The solar heat collected by the solar absorber was analyzed based on the TMY data, and the heat pump system was evaluated considering the aforementioned solar heat, ambient temperature, and compressor efficiency. Accordingly, this paper presents a detailed numerical analysis of the DXSAHP for three different regions with TMY data in South Korea, namely, the cold (Daegwanryeong), normal (Daejeon) and warm (Jeju) districts. A detailed analysis of the operational performance of the DXSAHP, such as heating performance, work input, and heating COP, was conducted by applying the monthly average climatic conditions recorded in the TMY data.
반도체 식각 공정용 초저온 냉각 시스템 설계를 위한 비가연성 혼합냉매 응축 및 비등 열전달 계수 측정
이천규,이정길 한국반도체디스플레이기술학회 2023 반도체디스플레이기술학회지 Vol.22 No.3
In this study, experimental approach of the measurement of condensation and evaporation heat transfer coefficients is discussed for mixed refrigerants using in the ultra low-temperature cooling system for semiconductor etching process. An experimental apparatus was described performing the condensation and evaporation heat transfer measurements for mixed refrigerants. The mixed refrigerant used in this study was composed of the optimal mixture determined in previous research, with a composition of Ar:R14:R23:R218 = 0.15:0.4:0.15:0.3. The experiments were conducted over a temperature range from -82°C to 15°C and at pressures ranging from 18.5 bar to 5 bar. The convection heat transfer coefficients of the mixed refrigerant were measured at flow rates corresponding to actual operating conditions. The condensation heat transfer coefficient ranged from approximately 0.7 to 0.9 kW/m2K, while the evaporation heat transfer coefficient ranged from 1.0 to 1.7 kW/m2K. The detailed discussion of the experimental methods, procedures, and results were described in this paper.