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RF 마그네트론 스퍼터링에 의한 ZnO박막의 증착 및 구리 도우핑 효과
이진복,이혜정,서수형,박진석,Lee, Jin-Bok,Lee, Hye-Jeong,Seo, Su-Hyeong,Park, Jin-Seok 대한전기학회 2000 전기학회논문지C Vol.53 No.12
Thin films of ZnO are deposited by using an RF magnetron sputtering with varying the substrate temperature(RT~39$0^{\circ}C$) and RF power(50~250W). Cu-doped ZnO(denoted by ZnO:Cu) films have also been prepared by co-spputtering of a ZnO target on which some Cu-chips are attached. Different substrate materials, such as Si, $SiO_{2}/Si$, sapphire, DLC/Si, and poly-diamond/Si, are employed to compare the c-axial growth features of deposited ZnO films. Texture coefficient(TC) values for the (002)-preferential growth are estimated from the XRD spectra of deposited films. Optimal ranges of RF powers and substrate temperatures for obtaining high TC values are determined. Effects of Cu-doping conditions, such as relative Cu-chip sputtering areas, $O_{2}/(Ar+O_{2})$ mixing ratios, and reactor pressures, on TC values, electrical resistivities, and relative Cu-compositions of deposited ZnO:Cu films have been systematically investigated. XPS study shows that the relative densities of metallic $Cu(Cu^{0})$ atoms and $CuO(Cu^{2+})$-phases within deposited films may play an important role of determining their electrical resistivities. It should be noted from the experimental results that highly resistive(> $10^{10}{\Omega}cm$ ZnO films with high TC values(> 80%) can be achieved by Cu-doping. SAW devices with ZnO(or Zn):Cu)/IDT/$SiO_{2}$/Si configuration are also fabricated to estimate the effective electric-mechanical coupling coefficient($k_{eff}^{2}$) and the insertion loss. It is observed that the devices using the Cu-doped ZnO films have a higher $k_{eff}^{2}$ and a lower insertion loss, compared with those using the undoped films.
장재혁 ( Jang Jae Hyeog ),정영환 ( Jeong Yeong Hwan ),조경현 ( Jo Gyeong Hyeon ),정지윤 ( Jeong Ji Yun ),문종수 ( Mun Jong Su ),서수형 ( Seo Su Hyeong ),박양서 ( Park Yang Seo ) 대한산부인과학회 2003 Obstetrics & Gynecology Science Vol.46 No.8
Granulosa cell tumors costitute 1% to 2% of all ovarian tumors and occur mostly in adult women. Juvenile granulosa cell tumor (JGCT) differs from the adult type in clinical and pathologic features as well as biological behavior. Usually associated with es
정영환 ( Jeong Yeong Hwan ),장재혁 ( Jang Jae Hyeog ),문기숙 ( Mun Gi Sug ),정지윤 ( Jeong Ji Yun ),문종수 ( Mun Jong Su ),서수형 ( Seo Su Hyeong ),박양서 ( Park Yang Seo ) 대한산부인과학회 2003 Obstetrics & Gynecology Science Vol.46 No.10
Heterotopic pregnancy is that intrauterine pregnancy is accompanied by a coexisting ectopic pregnancy. The incidence of this disease was very rare, but it has been increased considerably with increasing cases of assisted reproductive technologies and tuba
문기숙 ( Mun Gi Sug ),조경현 ( Jo Gyeong Hyeon ),김은주 ( Kim Eun Ju ),정지윤 ( Jeong Ji Yun ),남은숙 ( Nam Eun Sug ),조성진 ( Jo Seong Jin ),문종수 ( Mun Jong Su ),서수형 ( Seo Su Hyeong ),박양서 ( Park Yang Seo ) 대한산부인과학회 2004 Obstetrics & Gynecology Science Vol.47 No.3
Lipid cell tumors of the ovary are the rarest functional ovarian neoplasm, and malignant variants are unusual. Although rare, due to endocrinological activity, these tumors are of great clinical interest. Recently we experienced a case of lipid cell tumor of the right ovary in 21 years old female, who presented with menometrorrhagia and menorrhagia, and reported it with a brief review of literatures.