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TiS$i_2$ 박막의 열안정성에 미치는 막 스트레스의 영향
김영욱,김영욱,고종우,이내인,김일권,박순오,안성태,이문용,이종길,Kim, Yeong-Uk,Kim, Yeong-Uk,Go, Jong-U,Lee, Nae-In,Kim, Il-Gwon,Park, Sun-O,An, Seong-Tae,Lee, Mun-Yong,Lee, Jong-Gil 한국재료학회 1993 한국재료학회지 Vol.3 No.1
단결정 실리콘위에 스퍼터법으로 증착된 티타니움막을 급속가열로에서 고상반응에 의해 형성시킨 면저항 1.2 ohm/sq. 내외의 TiS$i_2$ 박막에 있어서 열안정성을 상부절연막의 유무 및 종류에 따라 조사하였다. 상부절연막은 상압 CVD로 증착한 USG(Undoped Silicate Glass, Si$i_2$) 막과 플라즈마 CVD법으로 증착한 PE-SiN(S$i_3$$N_4$)막을 사용했다. 열안정성 평가는 90$0^{\circ}C$에서 시간을 달리하여 TiS$i_2$막, PE-SiN막, USG막의 스트레스는 각각 1.3${\times}{10^{9}}$, 1.25 ${\times}{10^{10}}$, 2.26 ${\times}{10^{10}}$ dyne/c$m^2$의 인장응력을 나타내었다. 응집현상은 TiS$i_2$의 응집현상은 Nabarro-Herring 마이크로 크리프에 의한 원자의 확산관점에서 검토되었다. Abstract The effect of the film stress on the thermal stability of TiSi, films under the dielectric overcoat was investigated. TiS$i_2$ films with the sheet resistance of 1.2 ohm/sq. were produced by a solid-state reaction between sputtered Ti film and single-crystalline Si in an RTA (rapid thermal anneal) machine. Dielectric overcoats such as the USG (Undoped Silicate Glass, Si$O_2$) film and the PE-SiN(S$i_3$$N_4$) film were deposited by AP-CVD and PE-CVD, respectively, on the TiS$i_2$ film. The thermal stability of the TiSi, film was evaluated by changes in the sheet resistance, film stress and microstructure after furnace anneals at 90$0^{\circ}C$. Agglomeration of the TiSi2 film high temperatures results in the increase of sheet resistance and the decrease of tensile stress of TiSi, film. The stress level of the TiSi" PE-SiN and ~SG films at 90$0^{\circ}C$C was 1.3${\times}{10^{9}}$, 1.25 ${\times}{10^{10}}$, 2.26 ${\times}{10^{10}}$ dyne/c$m^2$ in tensile, respectively. Dielectric films deposited by CVD on TiSi, was effective on preventing agglomeration of TiSi,. The PE-SiN film mproved the thermal stability of TiSi, more effectively than the AP-CVD USG film. It is considered that agglomeration of the TiS$i_2$ film under the stress of dielectric overcoat at high temperature can be caused by a diffusional flow of atom called Nabarro-Herring microcreep.reep.
김영욱,Kim, Yeong-Uk 한국화재보험협회 1984 防災와 保險 Vol.23 No.-
화재보험요율의 점진적이고도 합리적인 체계개선은 보험자와 계약자의 호혜원칙에 입각한 수준에서 견지되어야 하며 국민경제 및 산업발전에 일익을 담당하여야 한다.
金永旭 순천청암대학 1980 論文集-順川看護專門大學 Vol.6 No.-
This is studied on the theory of Parker's education that as a pioneer of new education critizied traditional education, developed new educational theory and built the basis of modern education handing over Dewey towards the end of 19th centry, in the United Nations. Making an experiment on new theory of childcentered experimental and curriculum-intergrated education and and teacher training, in order to improve iormal and textbook-centered traditional education, he changed traditional knowledge-mills into educational communities. Thereefore, present study is outlined the following contents on the basis of theory of concentration forming the core of Parker's thought in education. 1. Parker's career an a educator 2. Parker's thought in education a. basis theory of education b. the theory of concentration education 3. argument on the Parker's educational thought 4. Parker's educational influence
看護學科 進學動機에 따른 意識 調査 : 順天看專을 對象으로 On Soonchun Nursing Junior College
金永旭 순천청암대학 1975 論文集-順川看護專門大學 Vol.1 No.-
Since Soonchun Nursing high school was raised to the status of Nursing Junior College in 1973, not a few students have applies for this school without understanding of particularuty and speciality of this school, consequently many problems and difficulties have been brough about to the education and administration of this school, An important element of the above is that students have applied this nursing school without duly consideration of their intellectural power and aptitude as nurse, and that their parents blindly insisted upon their becoming nurses, In order to guide the students well and to accomplish the purpose of education, the following subjects were investigated; ① Motives of applying for nursing school ② Occupations of parents of students in this school ③ Academic backgrounds of students' parents ④ Investigation to want an Occupation of students in this school.
김영욱,Kim, Yeong-Uk 한국화재보험협회 1986 防災와 保險 Vol.29 No.-
현재 사용하고 있는 우리나라의 화재보험 요율은 그 약관이 국문증권이든 영문증권이든 간에 엄격한 의미에서의 자유요율은 없고 모두 인가요율의 형태를 취하고 있는 것이다.