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NH4OH-H2O2-H2O 혼합액을 이용한 GaAs 의 습식식각 특성 연구 및 이를 이용한 부유된 시각형 단면을 가지는 GaAs 미세구조물의 제작 방법
조동일,박상준,이승기,김종팔,백승준,김세태,구치완 한국센서학회 2001 센서학회지 Vol.10 No.5
In this research, we investigate wet-etching properties of GaAs in NH₄OH-H₂O₂-H₂O, and develop the fabrication method of GaAs microstructures with rectangular cross section using (001) GaAs substrate. For obtaining wet-etching properties with respect to crystallographic orientation, the etch rates and cross-section etch profiles of (001) GaAs with 16 different compositions and the undercut rates with 5 different compositions are measured using NH₄OH-H₂O₂-H₂O mixed solutions. From these experimental data, a new GaAs micromachining method in bulk (001) GaAs is proposed, and used to fabricate a released microbridges with a rectangular cross section. The developed GaAs micromachining method can be very useful for low-less, highly-tunable capacitors for RF components and for integration with GaAs optical components.