Filtered Vacuum Arc법으로 WC-Co계 합금 표면에 형성된 DLC 박막의 구조적 특성 연구

다국어 초록 (Multilingual Abstract)

In this study, DLC films were deposited on the cobalt cemented tungsten carbide(WC-Co) substrate adopting the filtered vacuum arc(FVA) technique at different substrate bias voltages and various cobalt content. As a result of Raman analysis, the spectra from all samples in this study have similar shape, with a broad skewed peak centered at approximately 1,550[cm<SUP>-1</SUP>], which is the characteristic of the diamond-like structure. Each spectrum was decomposed into two Gaussian line curves, one at the lower wave numbers between 1,322[cm<SUP>-1</SUP>] and 1,329[cm<SUP>-1</SUP>](D peak) and the other at the higher wave numbers between 1,565[cm<SUP>-1</SUP>] and 1,570[cm<SUP>-1</SUP>](G peak). However, we could not find any change of Raman-shift. According to XPS, as the cobalt content increased, sp3 ratio was decreased. This effect can be inferred that the cobalt binder suppress diamond nucleation and subsequent growth of diamond.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. 실험방법 및 장비
• 3. 결과 및 고찰
• 4. 결론
• References

참고문헌 (Reference)

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2 R. Polini, "Wear Resistance of Nano- and Micro-crystalline Diamond Coatings onto WC–Co with Cr/CrN Interlayers" 519 : 1629-1635, 2010

3 N. Paik, "Raman and XPS Studies of DLC Films Prepared by a Magnetron Sputter-type Negative Ion Source" 200 : 2170-2174, 2005

4 D. Beeman, "Modeling Studies of Amorphous Carbon" B30 : 4951-, 1984

5 A. C. Ferrari, "Interpretation of Raman Spectra of Disordered and Amorphous Carbon" B61 : 14095-, 2000

6 Krishna Seshan, "Handbook of Thin Film Deposition" 287-317, 2002

7 J. Robertson, "Diamond-like Amorphous Carbon" R37 : 129-281, 2002

8 R. Polini, "Chemically Vapour Deposited Diamond Coatings on Cemented Tungsten Carbides: Substrate Pretreatments, Adhesion and Cutting Performance" 515 : 4-13, 2006

9 N. Konkhunthot, "Characterization of Diamond-like Carbon (DLC) Films Deposited by Filtered Cathodic Vacuum Arc Technique" 23 (23): 35-40, 2013