<P><B>Abstract</B></P> <P>Aluminum-doped zinc oxide (AZO) films were deposited on glass substrates with pulsed direct current (DC) magnetron sputtering. Deposition was carried out in both static and dynamic modes. The pu...
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https://www.riss.kr/link?id=A107429303
2017
-
SCI,SCIE,SCOPUS
학술저널
144-152(9쪽)
0
상세조회0
다운로드다국어 초록 (Multilingual Abstract)
<P><B>Abstract</B></P> <P>Aluminum-doped zinc oxide (AZO) films were deposited on glass substrates with pulsed direct current (DC) magnetron sputtering. Deposition was carried out in both static and dynamic modes. The pu...
<P><B>Abstract</B></P> <P>Aluminum-doped zinc oxide (AZO) films were deposited on glass substrates with pulsed direct current (DC) magnetron sputtering. Deposition was carried out in both static and dynamic modes. The pulsed DC sputtering process provided a stable deposition of AZO films without arcing, resulting in good crystallinity, unlike simple DC magnetron sputtering. The growth characteristics of the films sputtered on various moving speeds of the in-line dynamic mode are investigated and compared to those of the static mode. AZO films deposited at a moving speed of 120cm/min showed a dominant (002) orientation, a smooth surface roughness, and a higher figure of merit (FOM), of which properties are similar to those of the static mode. Comparisons of the characteristics obtained at several moving speeds showed that better crystallinity was obtained at the higher moving speed of 120cm/min. This improvement could be attributed to an averaging effect, which is due to more frequent interruption and initiation of the growth at the higher moving speed. Optical transmission characteristics were compared between the static and dynamic modes, and analyzed in terms of the complex indices of refraction and interference effects of light.</P> <P><B>Highlights</B></P> <P> <UL> <LI> AZO films were deposited by pulsed DC sputtering and compared to those of DC sputtering. </LI> <LI> The films were sputtered at various moving speeds of in-line dynamic and static modes. </LI> <LI> The films deposited at 120cm/min showed prominent crystallinity similar to the static mode. </LI> <LI> The films deposited at 120cm/min showed the advanced electrical and optical properties. </LI> </UL> </P>