초저온 식각을 위한 냉각용량 2kW 급 -100 ℃ 비가연성 혼합냉매 줄톰슨 냉각기의 실험적 고찰 = Experimental Investigation of 2kW Class Non-flammable Mixed Refrigerant Joule-Thomson Refrigerator with Cooling Temperature of -100 ℃ for Cryogenic Etching

다국어 초록 (Multilingual Abstract)

This paper presents the design and experimental analysis of a cryogenic refrigeration system for -100 ℃, primarily intended for semiconductor etching process. The refrigeration system utilizes non-flammable mixed refrigerant Joule-Thomson refrigeration cycle, incorporating a precooling stage to enhance overall performance. The selected refrigerants for the system include R1234yf for the precooling stage, and Ar, R14, R23 and R218 for the main cooling stage of the Joule-Thomson refrigeration cycle. Design results according to the system constraints and experimental results are discussed, including lowest evaporation temperature, compressor isentropic efficiency and overall pressure tendencies. The achieved refrigerant fraction from optimal design is Ar: R14: R23: R218 = 0.15: 0.4: 0.15: 0.3, indicating COP of 0.1118 at the isentropic compressor efficiency of 50%. The experimental result shows the developed system reaches steady state in approximately 3 hours.