- ABSTRACT
- 1. 서론
- 2. 성형 실험
- 3. 성형 실험 및 해석
- 4. 결론
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https://www.riss.kr/link?id=A76286525
2005
Korean
555
SCOPUS,KCI등재
학술저널
159-164(6쪽)
0
0
상세조회0
다운로드목차 (Table of Contents)
참고문헌 (Reference)
1 Hirai,Y.,Fujiwara,M.,Okuno,T, "Study of the resist deformation in nanoimprint lithography" 19 (19): 2811-2815, 2001.
2 G, "Preparation and characterization of hydrophobic organic-inorganic composite thin films of PMMA/SiO2/TiO2 with low friction coefficient" 221 : 129-135, 2004.
3 H, "Nanostructuring of polymers and fabrication of interdigitated electrodes by hot embossing lithography" 46 : 121-124, 1999.
4 Chen, "Micro contact printing and pattern transfer with a tri-layer processing" lau 53 (lau 53): 253-256, 2000.
5 Chou,S. Y.,Krauss,P. R.,Renstrom,P. J, "Imprint of sub-25㎚ vias and trenches in polymers" 67 : 3114-, 1995.
6 Becker, "Hot embossing as a method for the fabrication of polymer high aspect ratio structures" 83 : 130-135, 2000.
7 L, "Giant magnetoresistance in magnetic multilayered nanowires" 65 : 2484-2486, 1994.
8 Heng, "A novel technique for measuring etch rate distribution of Si" 79 : 136-140, 2000.
9 Heng, "A novel technique for measuring etch rate distribution of Si" 79 : 136-140, 2000.
10 Bogdanski, "3D-Hot embossing of undercut structures - an approach to micro-zippers" 73-74 : pp.190-1952004.
1 Hirai,Y.,Fujiwara,M.,Okuno,T, "Study of the resist deformation in nanoimprint lithography" 19 (19): 2811-2815, 2001.
2 G, "Preparation and characterization of hydrophobic organic-inorganic composite thin films of PMMA/SiO2/TiO2 with low friction coefficient" 221 : 129-135, 2004.
3 H, "Nanostructuring of polymers and fabrication of interdigitated electrodes by hot embossing lithography" 46 : 121-124, 1999.
4 Chen, "Micro contact printing and pattern transfer with a tri-layer processing" lau 53 (lau 53): 253-256, 2000.
5 Chou,S. Y.,Krauss,P. R.,Renstrom,P. J, "Imprint of sub-25㎚ vias and trenches in polymers" 67 : 3114-, 1995.
6 Becker, "Hot embossing as a method for the fabrication of polymer high aspect ratio structures" 83 : 130-135, 2000.
7 L, "Giant magnetoresistance in magnetic multilayered nanowires" 65 : 2484-2486, 1994.
8 Heng, "A novel technique for measuring etch rate distribution of Si" 79 : 136-140, 2000.
9 Heng, "A novel technique for measuring etch rate distribution of Si" 79 : 136-140, 2000.
10 Bogdanski, "3D-Hot embossing of undercut structures - an approach to micro-zippers" 73-74 : pp.190-1952004.
레이저 국소증착을 이용한 TFT-LCD 회로 수정용 미세 텅스텐 패턴 제조
학술지 이력
연월일 | 이력구분 | 이력상세 | 등재구분 |
---|---|---|---|
2023 | 평가예정 | 해외DB학술지평가 신청대상 (해외등재 학술지 평가) | |
2020-01-01 | 평가 | 등재학술지 유지 (해외등재 학술지 평가) | |
2013-01-01 | 평가 | 등재학술지 유지 (등재유지) | |
2010-01-01 | 평가 | 등재학술지 유지 (등재유지) | |
2008-06-23 | 학회명변경 | 영문명 : Korean Society Of Precision Engineering -> Korean Society for Precision Engineering | |
2008-01-01 | 평가 | 등재학술지 유지 (등재유지) | |
2006-07-07 | 학술지명변경 | 외국어명 : 미등록 -> Journal of the Korean Society for Precision Engineering | |
2006-01-01 | 평가 | 등재학술지 유지 (등재유지) | |
2004-01-01 | 평가 | 등재학술지 유지 (등재유지) | |
2001-01-01 | 평가 | 등재학술지 선정 (등재후보2차) | |
1998-07-01 | 평가 | 등재후보학술지 선정 (신규평가) |
학술지 인용정보
기준연도 | WOS-KCI 통합IF(2년) | KCIF(2년) | KCIF(3년) |
---|---|---|---|
2016 | 0.26 | 0.26 | 0.26 |
KCIF(4년) | KCIF(5년) | 중심성지수(3년) | 즉시성지수 |
0.24 | 0.22 | 0.449 | 0.12 |