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https://www.riss.kr/link?id=O48106611
2007년
eng
XXXX-XXXX
학술저널
PROCEEDINGS OF THE SENSOR SYMPOSIUM ON SENSORS MICROMACHINES AND APPLIED SYSTEMS
453-456 [※수록면이 p5 이하이면, Review, Columns, Editor's Note, Abstract 등일 경우가 있습니다.]
Sensor symposium on sensors, micromachines and applied systems
24th
Tokyo, Japan
2007; Oct
0
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Medical Technology Devices Based on MEMS Technology
Integrated CNT-MEMS Sensors: The Next Generation Extreme Low-Power Sensors
Ultra Fine Diamond Tools Fabricated by Nickel/Diamond Thermochemical Reaction
Fabrication of Three Dimensional Silicon Structures Using Mask with Rectangle Openings