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      KCI등재 SCOPUS

      Investigating Undoped HfO2 as Ferroelectric Oxide in Leaky and Non-Leaky FE–DE Heterostructure

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      https://www.riss.kr/link?id=A106398624

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      다국어 초록 (Multilingual Abstract)

      In this paper, we have investigated non-leaky and leaky FE–DE heterostructure with undoped HfO 2 and Zr doped HfO 2 as a ferroelectric material. Use of undoped HfO 2 in place of Zr doped HfO 2 as a ferroelectric material will ease the deposition pro...

      In this paper, we have investigated non-leaky and leaky FE–DE heterostructure with undoped HfO 2 and Zr doped HfO 2 as a ferroelectric material. Use of undoped HfO 2 in place of Zr doped HfO 2 as a ferroelectric material will ease the deposition process and simplify the processing steps, as ferroelectricity in undoped HfO 2 can be obtained without introduction of dopant elements. This replacement of ferroelectric oxide enhances the performance of heterostructure in terms of absolute voltage amplifi cation ( VD > VS ). Undoped HfO 2 provides higher magnitude voltage amplifi cation as compared to Zr doped HfO2 although the range to voltage amplifi cation is reduced.

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      참고문헌 (Reference)

      1 Asif Islam Khan, "Work Function Engineering for Performance Improvement in Leaky Negative Capacitance FETs" Institute of Electrical and Electronics Engineers (IEEE) 38 (38): 1335-1338, 2017

      2 Dayu Zhou, "Wake-up effects in Si-doped hafnium oxide ferroelectric thin films" AIP Publishing 103 (103): 192904-, 2013

      3 Min Hyuk Park, "The effects of crystallographic orientation and strain of thin Hf0.5Zr0.5O2 film on its ferroelectricity" AIP Publishing 104 (104): 072901-, 2014

      4 Min Hyuk Park, "Study on the degradation mechanism of the ferroelectric properties of thin Hf 0.5Zr0.5O2 films on TiN and Ir electrodes" AIP Publishing 105 (105): 072902-, 2014

      5 T. Schenk, "Strontium doped hafnium oxide thin films: wide process window for ferroelectric memories" 260-263, 2013

      6 T. S. Böscke, "Phase transitions in ferroelectric silicon doped hafnium oxide" AIP Publishing 99 (99): 112904-, 2011

      7 Takashi Ando, "On the Electron and Hole Tunneling in a $ \hbox{HfO}_{2}$ Gate Stack With Extreme Interfacial-Layer Scaling" Institute of Electrical and Electronics Engineers (IEEE) 32 (32): 865-867, 2011

      8 Asif Islam Khan, "Negative Capacitance Behavior in a Leaky Ferroelectric" Institute of Electrical and Electronics Engineers (IEEE) 63 (63): 4416-4422, 2016

      9 B. Neese, "Large Electrocaloric Effect in Ferroelectric Polymers Near Room Temperature" American Association for the Advancement of Science (AAAS) 321 (321): 821-823, 2008

      10 J. Müller, "Insights into electrical characteristics of silicon doped hafnium oxide ferroelectric thin films" AIP Publishing 100 (100): 082905-, 2012

      1 Asif Islam Khan, "Work Function Engineering for Performance Improvement in Leaky Negative Capacitance FETs" Institute of Electrical and Electronics Engineers (IEEE) 38 (38): 1335-1338, 2017

      2 Dayu Zhou, "Wake-up effects in Si-doped hafnium oxide ferroelectric thin films" AIP Publishing 103 (103): 192904-, 2013

      3 Min Hyuk Park, "The effects of crystallographic orientation and strain of thin Hf0.5Zr0.5O2 film on its ferroelectricity" AIP Publishing 104 (104): 072901-, 2014

      4 Min Hyuk Park, "Study on the degradation mechanism of the ferroelectric properties of thin Hf 0.5Zr0.5O2 films on TiN and Ir electrodes" AIP Publishing 105 (105): 072902-, 2014

      5 T. Schenk, "Strontium doped hafnium oxide thin films: wide process window for ferroelectric memories" 260-263, 2013

      6 T. S. Böscke, "Phase transitions in ferroelectric silicon doped hafnium oxide" AIP Publishing 99 (99): 112904-, 2011

      7 Takashi Ando, "On the Electron and Hole Tunneling in a $ \hbox{HfO}_{2}$ Gate Stack With Extreme Interfacial-Layer Scaling" Institute of Electrical and Electronics Engineers (IEEE) 32 (32): 865-867, 2011

      8 Asif Islam Khan, "Negative Capacitance Behavior in a Leaky Ferroelectric" Institute of Electrical and Electronics Engineers (IEEE) 63 (63): 4416-4422, 2016

      9 B. Neese, "Large Electrocaloric Effect in Ferroelectric Polymers Near Room Temperature" American Association for the Advancement of Science (AAAS) 321 (321): 821-823, 2008

      10 J. Müller, "Insights into electrical characteristics of silicon doped hafnium oxide ferroelectric thin films" AIP Publishing 100 (100): 082905-, 2012

      11 Stefan Mueller, "Incipient Ferroelectricity in Al-Doped HfO2 Thin Films" Wiley 22 (22): 2412-2417, 2012

      12 Ekaterina Yurchuk, "Impact of layer thickness on the ferroelectric behaviour of silicon doped hafnium oxide thin films" Elsevier BV 533 : 88-92, 2013

      13 Uwe Schroeder, "Impact of different dopants on the switching properties of ferroelectric hafniumoxide" Japan Society of Applied Physics 53 (53): 08LE02-, 2014

      14 J. Müller, "Ferroelectricity in yttrium-doped hafnium oxide" AIP Publishing 110 (110): 114113-, 2011

      15 K. D. Kim, "Ferroelectricity in undoped-HfO2 thin films induced by deposition temperature control during atomic layer deposition" Royal Society of Chemistry (RSC) 4 (4): 6864-6872, 2016

      16 Patrick Polakowski, "Ferroelectricity in undoped hafnium oxide" AIP Publishing 106 (106): 232905-, 2015

      17 Johannes Müller, "Ferroelectricity in Simple Binary ZrO2 and HfO2" American Chemical Society (ACS) 12 (12): 4318-4323, 2012

      18 S. Mueller, "Ferroelectricity in Gd-Doped HfO2 Thin Films" The Electrochemical Society 1 (1): N123-N126, 2012

      19 Min Hyuk Park, "Ferroelectricity and Antiferroelectricity of Doped Thin HfO2-Based Films" Wiley 27 (27): 1811-1831, 2015

      20 N. Setter, "Ferroelectric thin films: review of materials, properties, and applications" 100 (100): 51606-, 2006

      21 Min Hyuk Park, "Ferroelectric properties and switching endurance of Hf0.5Zr0.5O2films on TiN bottom and TiN or RuO2 top electrodes" Wiley 8 (8): 532-535, 2014

      22 Patrick D. Lomenzo, "Ferroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes" American Vacuum Society 32 (32): 03D123-, 2014

      23 J. Muller, "Ferroelectric hafnium oxide: A CMOS-compatible and highly scalable approach to future ferroelectric memories" 10.8.1-10.8.4, 2013

      24 P. Polakowski, "Ferroelectric deep trench capacitors based on Al:HfO2 for 3D nonvolatile memory applications" 1-4, 2014

      25 J. Müller, "Ferroelectric Zr0.5Hf0.5O2 thin films for nonvolatile memory applications" AIP Publishing 99 (99): 112901-, 2011

      26 Min Hyuk Park, "Evolution of phases and ferroelectric properties of thin Hf0.5Zr0.5O2 films according to the thickness and annealing temperature" AIP Publishing 102 (102): 242905-, 2013

      27 Sheng-Guo Lu, "Electrocaloric Materials for Solid-State Refrigeration" Wiley 21 (21): 1983-1987, 2009

      28 Min Hyuk Park, "Effect of forming gas annealing on the ferroelectric properties of Hf0.5Zr0.5O2 thin films with and without Pt electrodes" AIP Publishing 102 (102): 112914-, 2013

      29 S. H. Shin, "Direct observation of self-heating in III–V gate-all-around nanowire MOSFETs" 20.3.1-20.3.4, 2014

      30 T. Olsen, "Co-sputtering yttrium into hafnium oxide thin films to produce ferroelectric properties" AIP Publishing 101 (101): 082905-, 2012

      31 Muhammad Abdul Wahab, "3D Modeling of Spatio-temporal Heat-transport in III-V Gate-all-around Transistors Allows Accurate Estimation and Optimization of Nanowire Temperature" Institute of Electrical and Electronics Engineers (IEEE) 62 (62): 3595-3604, 2015

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      2005-05-30 학회명변경 영문명 : 미등록 -> The Korean Institute of Electrical and Electronic Material Engineers KCI등재후보
      2005-05-30 학술지명변경 한글명 : Transactions on Electrical and Electroni -> Transactions on Electrical and Electronic Materials KCI등재후보
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