Effect of process gas on deposition efficiency of zirconia film in granule spray in vacuum

다국어 초록 (Multilingual Abstract)

Monoclinic zirconia films were deposited by spraying monoclinic zirconia granules on glass substrates in a low vacuumenvironment. In order to spray the granules through a nozzle, air and He were used to carry and accelerate the granules. Flowrates of air and He were varied in order to study their effect on granule velocity and deposition efficiency. For both air andHe, granule velocity increased with their flow rate. For the same gas flow rate, granule velocity was much higher when Hewas used than when air was used. Variation of deposition efficiency according to the gas and gas flow rate was similar to thatof granule velocity. Highest deposition efficiency was 1.87% which may be the highest deposition efficiency of ceramic filmsby room temperature spray of ceramic particles or granules to date. The results support that granule velocity is closely relatedto deposition efficiency. The deposited films were quite dense and retained the crystalline phase of the granules.

참고문헌 (Reference)

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