디스크형 압전진동자의 연동운동을 이용하는 마이크로 압전펌프 = Development of valveless piezoelectric micro-pump using peristaltic motion of two sided disk type vibrator

다국어 초록 (Multilingual Abstract)

Piezoelectric micro-pump should contain the physical running parts like check valves for acquiring the unilateral motion of fluid from the alternating motion of actuators. But the check valves raise many problems such as abrasion or exhaustive destruction by the recursive mechanical displacement. And the performances of micro pump are deteriorated by them. To solve these problems, we propose a novel type piezoelectric valveless micro-pump using peristaltic motion due to the traveling wave excitation. Proposed pump model consists of two piezoelectric ceramic plates, elastic metal body, caps for covering flow path, rubber rings for tight sealing and disk springs for the pressurization of pump body. The FEM simulation analysis of the proposed pump model was carried out to verify its operation mechanism. And a prototype pump was fabricated and evaluated to validate the proposed concepts. Maximum back pressure was 0.97㎪ and flow rate was 640μl/min under 130V<SUB>rms</SUB>, 67.5㎑ of driving voltage.