A new structure of the silicon solar cells with the tunneling phenomenon through a very thin dielectric film was fabricated by screen printing method. From the I-V characteristics of the MIS capacitors with a 2 nm of thin film, electrons that were acc...
A new structure of the silicon solar cells with the tunneling phenomenon through a very thin dielectric film was fabricated by screen printing method. From the I-V characteristics of the MIS capacitors with a 2 nm of thin film, electrons that were accumulated on the silicon surface were confirmed to pass by tunneling to the front electrode through the very thin Al2O3 film. A good C-V interface characteristic of the MIS capacitors was observed. Although the efficiency of the fabricated silicon solar cell with passivated tunneling Al2O3 film thickness of 2 nm was 3.15%, expected results are to be improved by the optimization of the solar cell processes parameters and cell design.