Micro-structure of cylindrical pillar with donut-shaped tip

다국어 초록 (Multilingual Abstract)

In this work, we offer to fabricate a micro-structure array of cylindrical pillar with donut-shaped tip, which has two functions of microchamber and omniphobic properties at once. By using MEMS process, we applied photo lithography, deep reactive etching and advantage of footing effect to fabricate cylindrical pillar with donut-shaped tip. Because of donut-shaped tip formed inside and outside cylindrical pillar, this architecture array has omniphobic properties without chemical surface treatment. In addition, the formation of a polymer roof which was induced by micro-dewetting effect gives proof of microchamber function. Eventually, we inserted micro particles in an empty space of the cylindrical pillar and covered a polymer roof on top of donut-shaped tip. We demonstrate the possibility of microchamber having polymer roof formed by micro-dewetting effect which can protect and store some materials inserted in structures. The special cylindrical pillar with donut-shaped tip of this study which show two functions simultaneously will contribute to various application fields such as micro- packaging, omniphobic surface fabrication.