롤투롤 나노 임프린트 시스템 균일 가압 모듈 개발

다국어 초록 (Multilingual Abstract)

It is difficult to use roll-to-roll (R2R) substrate transfer and pressing process to secure the productivity of the nanoimprint lithography (NIL) process based on the contact pressing mechanism R2R NIL patterning with a precise level of uniform pressure in the imprinting area. In conventional pressing, the precision of the imprint process is limited by bending deformation of the pressing roller, processing errors of roundness and straightness, and roller alignment errors. Thus, a new type of force point adjustable pressing roller (FPAP) module to minimize bending deformation of the pressing roller and an air cushion pressing roller (ACP) module to improve unevenness caused by roller deformation, roller geometrical errors were developed. The performance of the new uniform pressing module was experimentally verified: pressure uniformity at the imprinting contact surface was ±30% for the conventional pressing module compared to ±7% for the FPAP module. The ACP module improved this value to ±3.5%.

참고문헌 (Reference)

1 조영태, "롤러 가압 임프린트 공정에서 잔류막 두께 예측에 관한 연구" 한국기계가공학회 12 (12): 104-109, 2013

2 Myung-Gyu Kang, "Transparent Cu nanowire mesh electrode on flexible substrates fabricated by transfer printing and its application in organic solar cells" Elsevier BV 94 (94): 1179-1184, 2010

3 Roisum, D. R., "The Mechanics of Rollers" Tappi press 1998

4 Wei Wu, "Sub-10 nm Nanoimprint Lithography by Wafer Bowing" American Chemical Society (ACS) 8 (8): 3865-3869, 2008

5 McMackin, I., "Step and Repeat UV Nanoimprint Lithography Tools and Processes" VIII (VIII): 222-231, 2004

6 Sukang Bae, "Roll-to-roll production of 30-inch graphene films for transparent electrodes" Springer Science and Business Media LLC 5 (5): 574-578, 2010

7 Eun-Soo Hwang, "Micro Pattern Roll Mold for Large Area Display by Electroforming and Wrapping Method" IOP Publishing 48 (48): 050211-, 2009

8 Jiho Uh, "Laser Engraving of Micro-patterns on Roll Surfaces." Iron and Steel Institute of Japan 42 (42): 1266-1272, 2002

9 Se Hyun Ahn, "Large-Area Roll-to-Roll and Roll-to-Plate Nanoimprint Lithography: A Step toward High-Throughput Application of Continuous Nanoimprinting" American Chemical Society (ACS) 3 (3): 2304-2310, 2009

10 Se Hyun Ahn, "High-Speed Roll-to-Roll Nanoimprint Lithography on Flexible Plastic Substrates" Wiley 20 (20): 2044-2049, 2008

11 Eun-Soo Hwang, "Flexible Polysilicon Strain Gauge Array" IOP Publishing 42 (42): L810-L813, 2003

12 Michael D. Austin, "Fabrication of 5nm linewidth and 14nm pitch features by nanoimprint lithography" AIP Publishing 84 (84): 5299-5301, 2004

13 Heon Lee, "Effect of imprinting pressure on residual layer thickness in ultraviolet nanoimprint lithography" American Vacuum Society 23 (23): 1102-, 2005

14 Suho Ahn, "Design and Fabrication of Micro Optical Film by Ultraviolet Roll Imprinting" IOP Publishing 46 (46): 5478-5484, 2007

15 Jong G. Ok, "Continuous and scalable fabrication of flexible metamaterial films via roll-to-roll nanoimprint process for broadband plasmonic infrared filters" AIP Publishing 101 (101): 223102-, 2012

16 Se Hyun Ahn, "Bilayer metal wire-grid polarizer fabricated by roll-to-roll nanoimprint lithography on flexible plastic substrate" American Vacuum Society 25 (25): 2388-, 2007

17 He Gao, "Air Cushion Press for Excellent Uniformity, High Yield, and Fast Nanoimprint Across a 100 mm Field" American Chemical Society (ACS) 6 (6): 2438-2441, 2006

18 C. Y. Chang, "A roller embossing process for rapid fabrication of microlens arrays on glass substrates" Springer Science and Business Media LLC 12 (12): 754-759, 2006

19 Nazrin Kooy, "A review of roll-to-roll nanoimprint lithography" Springer Science and Business Media LLC 9 (9): 2014