MEMS 기반의 IR CO2 센서 제작 및 특성 평가 = A Fabrication of IR CO2 Sensor based on the MEMS and Characteristic Evaluation

다국어 초록 (Multilingual Abstract)

In this paper, we fabricated CO2 gas sensor based on the MEMS infrared sensor and characterized its electrical and CO2-sensing properties. The fabricated CO2 gas sensor by MEMS technique has many advantages over NDIR(nondispersive) CO2 sensor such as monolithic fabrication, very high selectivity on CO2, low power consumption and compact system. Microbolometer by surface micromachining was fabricated for gas detector and CO2 filter chip by bulk micromachining was fabricated for signal referencing. By using the proposed and fabricated gas sensor, we are expected to measure CO2 concentration more accurately with high reliability.

참고문헌 (Reference)

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