폴리머 용액법에 의한 In₂O₃ 첨가 나노 WO₃ 분말 합성 및 NO₂ 가스 센서 특성 = NO₂ Gas Sensing Properties of Nano-Sized In₂O₃ Doped WO₃ Powders Prepared from Polymer Solution Route

다국어 초록 (Multilingual Abstract)

$In_2O_3$ doped $WO_3$ powders were prepared by a polymer solution route and their $NO_2$ gas sensing properties were analyzed. The synthesized powders showed nano-sized particles with specific surface areas of $6.01{\sim}21.5m^2/g$ and the particle size and shape changed according to the content of $In_2O_3$. The gas sensors fabricated with the synthesized powders were tested at operating temperatures of $400{\sim}500^{\circ}C$ and 100~500 ppm concentrations of $NO_2$ atmosphere. The particle size and $In_2O_3$ content affected on the initial sensor resistance in an air atmosphere. The highest sensitivity (8.57 at $500^{\circ}C$), which was 1.77 higher than the sensor consisting of the pure $WO_3$ sample, was measured in the 0.5 mol% $In_2O_3$ doping sample. In addition, the response time and recovery time were improved by the addition of $In_2O_3$.