UV-광분해 과정에 의한 강유전체 Pb(Zr_(0.52)Ti_(0.48))O₃ 박막의 물성에 관한 연구 = A Study on the Physical Properties of ferroelectric the UV-photolysis processed Pb(Zr_(0.52)Ti_(0.48))O₃ thin films

다국어 초록 (Multilingual Abstract)

The Pb(Zr_(0.52)Ti_(0.48))O₃ thin films were fabricated by sol-gel method on Pt/Ti/SiO₂/Si substrates. UV-photolysis process was added before final annealing of the coated films. The crystallinity, the chemical species, the surface morphology, the surface roughness, and the interface states of the UV-processed PZT thin films were characterized using X-ray diffraction (XRD), Fourier transform infrared spectrometer (FT-IR), scanning electron microscope (SEM), atomic force microscope (AFM), and Auger electron spectroscopy (AES), respectively. The UV-photolysis processed PZT thin films exhibited enhanced ferroelectricity (P_(r)) and lower leakage current density than not-treated one. UV-photolysis process also made it possible to lower the crystallization temperature and to stabilize film surface and interface. The fatigue and retention test were also examined. It is thought that the UV-treatment process is very effective to enhance ferroelectric and electrical properties for the device application as ferroelectric random access memory.

목차 (Table of Contents)

• 목차
• 목차 = ⅰ
• 그림목차 = ⅲ
• 표목차 = ⅴ
• Ⅰ. 서론 = 1
• Ⅱ. 이론 = 4
• 1. 강유전체 = 4
• 2. Sol-gel 방법 = 11
• 3. UV-광분해 = 14
• 5. Interface states 와 Ferroelectricity = 15
• 5. Interface states 와 ferroelectricity = 16
• 6. Leakage current character = 17
• Ⅲ. 실험 방법 = 22
• 1. sol-gel process = 22
• 2. Sample 제작 과정 = 27
• 2-1. 기판 준비 = 27
• 2-2. PZT 박막의 제조 = 27
• 2-3. MFM 구조의 PZT 박막 축전기의 제조 = 30
• Ⅳ. 결과 및 분석 = 31
• 1. FT-IR분석 = 31
• 2. PZT 박막의 구조 분석 = 35
• 2-1. X-선 회절 분석 = 35
• 2-2. 주사식 전자 현미경(scanning electron microscope : SEM) = 40
• 2-3. 주사형 탐침 현미경(atomic force miroscope : AFM) = 44
• 3. 박막의 전기적 특성 = 48
• 3-1. 정전 용량-주파수 특성 (C-F) = 48
• 3-2. 정전 용량-전압 특성 (C-V) = 52
• 3-3. P-E 이력곡선 = 54
• 3-4. 전류-전압 특성 측정 = 59
• 3-5. Auger 전자 분광학 분석 (Auger electron spectroscopy : AES) = 61
• Ⅴ. 결론 = 64
• 참고문헌 = 67
• Abstract = 70