CoFeB/MgO 박막 재료의 열처리에 따른 강자성공명 특성

다국어 초록 (Multilingual Abstract)

We have measured the ferromagnetic resonance (FMR) signal in as deposited and 400 ℃ annealed CoFeB/MgO thin film to investigate the annealing effect on magnetic anisotropies and FMR linewidth (?H<SUB>PP</SUB>). The uniaxial anisotropy field (H<SUB>K1</SUB>) was only observed in the as deposited sample. Whereas, in the 400 ℃ annealed sample, the biaxial anisotropy field (H<SUB>K2</SUB>) was additionally observed in accompany with uniaxial anisotropy field (H<SUB>K1</SUB>). The appearance of biaxial anisotropy fields was originated from the crystalline growth of bcc CoFeB(001) from the MgO(001) interface and by the B diffusion during thermal annealing. Also, the ?H<SUB>PP</SUB> of 400 ℃ annealed sample was increased compared with that of as deposited sample, which was due to the broad distribution of the magnetization axis by the biaxial anisotropy.

참고문헌 (Reference)

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