1 조규중, "XY 선형 모션 스테이지 시스템의 반발력 보상 기구와 제어" 대한기계학회 35 (35): 599-607, 2011
2 ASML, "TWINSCAN NXT:1960Bi"
3 Arakelian, V. H., "Shaking Force and Shaking Moment Balancing of Mechanisms : A Historical Review with New Examples" 127 (127): 334-339, 2005
4 Greene, P. M., "Reaction Force Transfer System, US Patent, No. US006844635B2"
5 Ahn, H. -J., "Multi-Physical Analysis of Eddy Current Damper(ECD)for Reaction Force Compensation Device" 300-301 : 920-923, 2013
6 Ka, A., "Modular Stage with Reaction Force Cancellation, US Patent, No. US006917412B2"
7 Galburt, D. N., "Method, System, and Apparatus for Management of Reaction Loads in a Lithography System, US Patent, No. US006784978B2"
8 Sodano, H. A., "Improved Concept and Model of Eddy Current Damper" 128 (128): 294-302, 2006
9 Iwasaki, M., "High-Precision Motion Control Techniques : A Promising Approach to Improving Motion Performance" 6 (6): 32-40, 2012
10 Ebrahimi, B., "Eddy Current Damper Feasibility in Automobile Suspension : Modeling, Simulation and Testing" 18 (18): 015017-, 2009
1 조규중, "XY 선형 모션 스테이지 시스템의 반발력 보상 기구와 제어" 대한기계학회 35 (35): 599-607, 2011
2 ASML, "TWINSCAN NXT:1960Bi"
3 Arakelian, V. H., "Shaking Force and Shaking Moment Balancing of Mechanisms : A Historical Review with New Examples" 127 (127): 334-339, 2005
4 Greene, P. M., "Reaction Force Transfer System, US Patent, No. US006844635B2"
5 Ahn, H. -J., "Multi-Physical Analysis of Eddy Current Damper(ECD)for Reaction Force Compensation Device" 300-301 : 920-923, 2013
6 Ka, A., "Modular Stage with Reaction Force Cancellation, US Patent, No. US006917412B2"
7 Galburt, D. N., "Method, System, and Apparatus for Management of Reaction Loads in a Lithography System, US Patent, No. US006784978B2"
8 Sodano, H. A., "Improved Concept and Model of Eddy Current Damper" 128 (128): 294-302, 2006
9 Iwasaki, M., "High-Precision Motion Control Techniques : A Promising Approach to Improving Motion Performance" 6 (6): 32-40, 2012
10 Ebrahimi, B., "Eddy Current Damper Feasibility in Automobile Suspension : Modeling, Simulation and Testing" 18 (18): 015017-, 2009
11 DucCanh Nguyen, "Dynamic Analysis and Iterative Design of a Passive Reaction Force Compensation Device for a Linear Motor Motion Stage" 한국정밀공학회 15 (15): 2367-2373, 2014
12 Sodano, H. A., "Concept and Model of Eddy Current Damper for Vibration Suppression of a Beam" 288 (288): 1177-1196, 2005
13 William Singhose, "Command Shaping for Flexible Systems: A Review of the First 50 Years" 한국정밀공학회 10 (10): 153-168, 2009
14 Yo-han You, "A Passive Reaction Force Compensation (RFC) Mechanism for a Linear Motor Motion Stage" 한국정밀공학회 15 (15): 797-801, 2014
15 Chen, W., "A Passive Eddy Current Damper for Vibration Suppression of a Force Sensor" 46 (46): 075001-, 2013
16 DucCanh Nguyen, "A Fuzzy-P Controller of an Active Reaction Force Compensation (RFC) Mechanism for a Linear Motor Motion Stage" 한국정밀공학회 16 (16): 1067-1074, 2015
17 안형준, "2D Hall Sensor Array for Measuring the Position of a Magnet Matrix" 한국정밀공학회 1 (1): 125-129, 2014