1 "알기쉽고 재미있는 MEMS이야기" KAIST PRESS 2004
2 "반도체 소자 공정기술" 청문각 2006
3 "반도체 공정기술" 생능출판사 1999
4 "Silicon as a mechanical materials" 1982
5 "Microengineering, MEMS, and interfacing: a practical guide" CRC press 2003
6 "MEMS design and fabrication" Taylor & Francis 2006
7 "Development of a hip-integrated micro cooling device" 34 : 1076-1074, 2003
8 "Boiling of FC-72 on silicon chips with micro-pin-fins and submicron-scale roughness" 124 : 383-390, 2002
9 "An Introduction to microelectromechanical system engineering" Artech House 2000
1 "알기쉽고 재미있는 MEMS이야기" KAIST PRESS 2004
2 "반도체 소자 공정기술" 청문각 2006
3 "반도체 공정기술" 생능출판사 1999
4 "Silicon as a mechanical materials" 1982
5 "Microengineering, MEMS, and interfacing: a practical guide" CRC press 2003
6 "MEMS design and fabrication" Taylor & Francis 2006
7 "Development of a hip-integrated micro cooling device" 34 : 1076-1074, 2003
8 "Boiling of FC-72 on silicon chips with micro-pin-fins and submicron-scale roughness" 124 : 383-390, 2002
9 "An Introduction to microelectromechanical system engineering" Artech House 2000