SEM is very useful measuring equipment in micro and nano area. In generally, it has shown the limited measuring area about few micro meters, and is unsuitable for the accurate measurement above several tens of micro meters. This paper proposed the sti...
SEM is very useful measuring equipment in micro and nano area. In generally, it has shown the limited measuring area about few micro meters, and is unsuitable for the accurate measurement above several tens of micro meters. This paper proposed the stitching algorithm of electron beam split image using image processing technique. Finally stitching accuracy has been verified by comparing with AFM measuring data.