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이 학술지의 논문 검색
Evolution of Silicon Cleaning Technology Over the Last Twenty Years
Ruzyllo, J.; Hattori, T.; Novak, R.E.; Mertens, P.; Besson, P. Pennington, N.J.; Electrochemical Society 2007 p.3-10
Issues and Challenges of Cleaning for Nano-Scale NAND Flash Memory Manufacturing
Ryu, C.; Song, Y.; Jin, G.; Park, S. Pennington, N.J.; Electrochemical Society 2007 p.11-18
Corrosion Suppression During Wet Processes in FEOL and BEOL for 45nm Node and Beyond
Aoki, H.; Watanabe, D.; Hotta, S.; Kimura, C.; Sugino, T. Pennington, N.J.; Electrochemical Society 2007 p.19-32
Yield Improvement Using Cryogenic Aerosol for BEOL Defect Removal
Lauerhaas, J.; Kok, Y.; Hamzah, A.; Tan, L. Pennington, N.J.; Electrochemical Society 2007 p.33-40
Characteristics of High Power Laser Shock Waves and Their Cleaning Performance
Kim, T.; Yoo, Y.; Son, I.; Jang, D.; Kim, D.; Lee, J.; Choi, J.; Busnaina, A.; Park, J. Pennington, N.J.; Electrochemical Society 2007 p.41-46
Thermal Cleaning of Silicon Nitride with Fluorine and Additive Mixture
Shigemoto, T.; Sonobe, J. Pennington, N.J.; Electrochemical Society 2007 p.47-54
Wostyn, K.L.; Sano, K.; Eitoku, A.; Janssens, T.; Bearda, T.; Leunissen, L.; Mertens, P. Pennington, N.J.; Electrochemical Society 2007 p.55-62
Liu, L.; Kashkoush, I.; Chen, G.; Murphy, C. Pennington, N.J.; Electrochemical Society 2007 p.63-70
Etching of Thermal SiO2 in Supercritical CO2
Malhouitre, S.; Van Hoeymissen, J.; Case, C.; Granger, P. Pennington, N.J.; Electrochemical Society 2007 p.71-78
Removal of Organic Wax and Particles on Silicon after Batch Type Polishing by Ozonated DI Water
Yi, J.; Lee, S.; Kim, T.; Park, J.; Lee, G.; Bae, S. Pennington, N.J.; Electrochemical Society 2007 p.79-86