This paper presents a micrometer scale of a bar-type traveling wave ultrasonic motor. The proposed work is based on the cylindrical micro ultrasonic motor which consists of an 8 piezoelectric bar, is very small in size, and has been designed through a...
This paper presents a micrometer scale of a bar-type traveling wave ultrasonic motor. The proposed work is based on the cylindrical micro ultrasonic motor which consists of an 8 piezoelectric bar, is very small in size, and has been designed through a Micro-meter scale. It produces a high power/weight ratio, and efficiency is independent of the size of the motor. The different parameters of such motors are studied and analyzed. The motor produces an output power of 5.7 pW. The output torque is 0.28 nN. The produced rotation per minute is 2620 RPM with a preload of 0.98 μN. There is a great demand for high drive power for micro loads in many fields as per their requirement or field of application, such as micro-robots, microsurgery equipment, and MEMS applications.