Model Prediction Control Design for Inverse Multiplicative Structure Based Feedforward Hysteresis Compensation of a Piezo Nanopositioning Stage

다국어 초록 (Multilingual Abstract)

The inherent hysteresis nonlinearity of piezoelectric actuators seriously deteriorates the tracking performance of piezo-actuated nanopositioning stage, especially in large stroke applications. Usually, the model of piezo-actuated stage is given by cascading a rateindependent hysteresis submodel with a linear dynamics submodel. This paper develops a composite model predictive control (MPC) with feedforward hysteresis compensation based on the inverse multiplicative structure. The feedforward controller has the merit of non-inverse requirement. The linear MPC is utilized as a feedback controller with the feature of simple solution for the feedforward compensation system. Experimental tracking results of sinusoidal signals at different frequencies as well as complex signals show that the proposed method can improve the tracking performance of the piezo-actuated stage, verifying its effectiveness.

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