ICP (Inductively Coupled Plasma) MS (Mass Spectrometer) is a mass spectrometer that is widely used to analyze metal components. ICP MS is an instrument capable of analyzing almost all metal components.
Since ICP MS can detect even trace metal compo...
ICP (Inductively Coupled Plasma) MS (Mass Spectrometer) is a mass spectrometer that is widely used to analyze metal components. ICP MS is an instrument capable of analyzing almost all metal components.
Since ICP MS can detect even trace metal components, the sensitivity needs to be increased. In order to detect mainly the analyte ion components ionized in the input Ar plasma, the method mainly used by other major companies" equipment is equipped with an off-axis ion lens so that the ions passing through the sampler cone mainly pass only the ions through the characteristics of several ion optics. Through an off axis ion lens, ions must then be set to enter a beam approximately parallel to the axial direction of the next lens components.
When entering the collision/reaction chamber, argide components are removed by optimizing the incident position and velocity of ions, and only the most ion components to be analyzed must pass. Through this, the resolution at the detection stage is improved making it possible to detect ions even in trace amounts (tens of ppt to hundreds of ppt).
In this paper, we performed a simulation to find the condition that ions can enter parallel to the axial direction after the off-axis while maximizing the ion transmittance in the off-axis lens. The range of ion incident energy off-axis lens shape, and ion current range were examined through ion lens optics simulation to ensure that ions pass smoothly without colliding with the lens under certain conditions.