1 S. H. Lee, "Thermal stress analysis for polyimide thin film : The effect of solvent evaporation" 9 : 281-286, 2000
2 S. C. Park, "Simplified Cu/polyimide damascene approach based on imprint process of soluble block copolymer polyimide" 52 : 10-, 2013
3 S. W. Youn, "Selective Cu patterning on polyimide using UV surface treatment and electroless plating" 28 (28): 157-161, 2015
4 T. Nishino, "Residual stress and microstructures of aromatic polyimide with different imidization processes" 41 : 6913-6918, 2000
5 J. Huang, "Research on patterning of polyimide" 32 : 779-784, 2012
6 D. -R Chiou, "Pretilt angle of liquid crystals and liquid-crystal alignment on microgrooved polyimide surfaces fabricated by soft embossing method" 22 : 9403-9408, 2006
7 S. Kinuta, "Polyimide-based X-ray masks with advanced performance of pattern accuracy and thermal stability" 16 : 1299-1302, 2010
8 B. Cui, "Polyimide nanostructures fabricated by nanoimprint lithography and its applications" 83 : 906-909, 2006
9 Y. W. Wang, "Photosensitive polyimide/silica hybrid optical materials: Synthesis, properties, and pattering" 46 : 6959-6967, 2005
10 L. Li, "Photosensitive polyimide(PSPI)materials containing inorganic nano particles(I)PSPI/TiO2hybrid materials by sol-gel processs" 74 : 210-213, 2002
1 S. H. Lee, "Thermal stress analysis for polyimide thin film : The effect of solvent evaporation" 9 : 281-286, 2000
2 S. C. Park, "Simplified Cu/polyimide damascene approach based on imprint process of soluble block copolymer polyimide" 52 : 10-, 2013
3 S. W. Youn, "Selective Cu patterning on polyimide using UV surface treatment and electroless plating" 28 (28): 157-161, 2015
4 T. Nishino, "Residual stress and microstructures of aromatic polyimide with different imidization processes" 41 : 6913-6918, 2000
5 J. Huang, "Research on patterning of polyimide" 32 : 779-784, 2012
6 D. -R Chiou, "Pretilt angle of liquid crystals and liquid-crystal alignment on microgrooved polyimide surfaces fabricated by soft embossing method" 22 : 9403-9408, 2006
7 S. Kinuta, "Polyimide-based X-ray masks with advanced performance of pattern accuracy and thermal stability" 16 : 1299-1302, 2010
8 B. Cui, "Polyimide nanostructures fabricated by nanoimprint lithography and its applications" 83 : 906-909, 2006
9 Y. W. Wang, "Photosensitive polyimide/silica hybrid optical materials: Synthesis, properties, and pattering" 46 : 6959-6967, 2005
10 L. Li, "Photosensitive polyimide(PSPI)materials containing inorganic nano particles(I)PSPI/TiO2hybrid materials by sol-gel processs" 74 : 210-213, 2002
11 J. A. Bride, "Photolithographic micromolding of ceramics using plasma etched polyimide patterns" 63 : 3379-3381, 1993
12 I. -T. Pai, "Nanostructures prepared on polyimide film by nanoimprinting with the assistance of residual solvent" 16 : 2192-2196, 2006
13 K. Suzuki, "Nanopatterning on soluble block copolymer polyimide by nanoimprint" 54 : 088002-, 2015
14 A. B. Frazier, "High aspect ratio electroplated microstructures using a photosensitive polyimide process" 2 : 87-92, 1992
15 H. Komatsuzaki, "Flexible polyimide micropump fabricated using hot embossing" 50 : 06-, 2011
16 H. Hah, "Effect of the shape of imprinted alignment layer on the molecular orientation of liquid crystal" 27 : 798-801, 2007
17 S. W. Youn, "Dynamic mechanical thermal analysis, forming and mold fabrication studies for hot-embossing of a polyimide microfluidic platform" 18 : 045025-, 2008
18 J. Engel, "Development of polyimide flexible tactile sensor skin" 13 : 359-366, 2003
19 K. Suzuki, "Cu/Polyimide multilayer interconnections fabricated by nanoimprint at every lithography process" 27 (27): 73-80, 2014
20 U. Kang, "A high-speed capacitive humidity sensor with on-chip thermal reset" 47 : 702-710, 2000