열공압 방식의 polydimethylsiloxane 마이크로 펌프의 제작 및 특성 = Fabrication and Characteristics of Thermopneumatic-Actuated Polydimethylsiloxane Micropump

다국어 초록 (Multilingual Abstract)

A thermopneumatic-actuated polydimethylsiloxane (PDMS) micropump has been fabricated and their properties are characterized. The diffusers are used as a flow-rectifying element instead of passive check valves. The advantages of the proposed microvalve are of the low cost fabrication process and the transparent optical property using PDMS and indium tin oxide (ITO) glass. We presented the PDMS micropump that is easily integrated with the in-channel PDMS microvalves on the same substrate. The flowrate of the micropump increases linearly as the applied pulse voltage to the ITO heater increases. The fabricated ITO heater resistance is 6.54 ㏀. The peak of the flow rate is observed at the duty ratio of 10 % for the applied pulse voltage of 55 V at 6 Hz and the maximum flow rate of 78 nl/min is measured.

참고문헌 (Reference)

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