High-throughput patterning of photonic structures with tunable periodicity

다국어 초록 (Multilingual Abstract)

<P><B>Significance</B></P><P>Patterning large substrate areas with arrays of submicrometer structures in a facile, reliable, and timely manner is important for fabrication of optical elements that capture, guide, and convert light. RIPPLE (reactive interface patterning promoted by lithographic electrochemistry) is an electrochemical patterning method that is demonstrated for the rapid fabrication of periodic arrays of metallic circular Bragg gratings over large substrate areas. The grating period can be tuned in situ over micrometer and submicrometer length scales in a high-throughput fashion. We have identified point-like and annular scattering modes at different planes above the structured surface, suggesting the potential to use such structures to control the propagation of light. The described methods may be useful for high-throughput fabrication of sensors and light-management elements for energy conversion applications.</P><P>A patterning method termed “RIPPLE” (reactive interface patterning promoted by lithographic electrochemistry) is applied to the fabrication of arrays of dielectric and metallic optical elements. This method uses cyclic voltammetry to impart patterns onto the working electrode of a standard three-electrode electrochemical setup. Using this technique and a template stripping process, periodic arrays of Ag circular Bragg gratings are patterned in a high-throughput fashion over large substrate areas. By varying the scan rate of the cyclically applied voltage ramps, the periodicity of the gratings can be tuned in situ over micrometer and submicrometer length scales. Characterization of the periodic arrays of periodic gratings identified point-like and annular scattering modes at different planes above the structured surface. Facile, reliable, and rapid patterning techniques like RIPPLE may enable the high-throughput and low-cost fabrication of photonic elements and metasurfaces for energy conversion and sensing applications.</P>