This paper discusses the possibility of nano fabrication by introducing new concept of variable dwell time in Focused Ion Beam (FIB) machining. Even through the FIB machine has great potential in nano fabrication of sub 100㎚. It has several limitati...
This paper discusses the possibility of nano fabrication by introducing new concept of variable dwell time in Focused Ion Beam (FIB) machining. Even through the FIB machine has great potential in nano fabrication of sub 100㎚. It has several limitations, re-deposition of sputtered atoms, damages, and swelling of surfaces in low doses region. By that reasons, it is generally recognized that the fabrication of arbitrary shape is problematic. In the present paper, we propose a new machining concept of utilizing variable dwell time at a certain pixel. By simulation approach, we verified the possibility the proposed concept and demonstrate applications.