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https://www.riss.kr/link?id=O37018806
2003년
eng
학술저널
PARTICLES ON SURFACES -SYMPOSIUM-
279-292 [※수록면이 p5 이하이면, Review, Columns, Editor's Note, Abstract 등일 경우가 있습니다.]
9067643920
Particles on surfaces: detection, adhesion and removal
International symposium; 8th
Providence, RI
2002; Jun
0
상세조회0
다운로드
The nature and characterization of small particles
Surface and micro-analytical methods for particle identification
The haze of a wafer: A new approach to monitor nano-sized particles
Particle transport and adhesion in an ultra-clean ion-beam sputter deposition process