대면적/고정밀 3차원 표면형상의 5자유도 정합법 개발 및 평가

다국어 초록 (Multilingual Abstract)

In this paper, a new method is proposed for the five-degree-of-freedom precision alignment and stitching of three-dimensional surface-profile data sets. The control parameters for correcting thealignment error are calculated from the surface profile data for overlapped areas among the adjacent measuring areas by using the “least squares method” and “maximum lag position of cross correlation function.” To ensure the alignment and stitching reliability, the relationships betweenthe alignment uncertainty, overlapped area, and signal-to-noise level of the measured profile data are investigated. Based on the results of this uncertainty analysis, an appropriate size is proposed for the overlapped area according to the specimen’s surface texture and noise level.

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