<P>We have developed a novel atomic force microscope (AFM) probe as a highly sensitive sensor and an application of the probe into various mechanical tests for characterizing micro/nanostructures. Using MEMS fabrication technique, we have design...
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https://www.riss.kr/link?id=A107415472
2007
-
SCOPUS
학술저널
2253-2256(4쪽)
0
상세조회0
다운로드다국어 초록 (Multilingual Abstract)
<P>We have developed a novel atomic force microscope (AFM) probe as a highly sensitive sensor and an application of the probe into various mechanical tests for characterizing micro/nanostructures. Using MEMS fabrication technique, we have design...
<P>We have developed a novel atomic force microscope (AFM) probe as a highly sensitive sensor and an application of the probe into various mechanical tests for characterizing micro/nanostructures. Using MEMS fabrication technique, we have designed and fabricated rhombus-shaped symmetric AFM probe. Adhesion forces between silicon tip and artificial nano-hair structures of cyclic olefin copolymer (COC) and polypropylene (PP) were measured using the probe with a flat tip. The results exhibited the usual characteristics of force-displacement curves of COC and PP nano-hair structures, in which a pull-off force was detected at the point of unloading. The average adhesion forces of the COC and PP hair structures are about 9.48 μN and 10.67 μN, respectively.</P>
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