Ru interfacial layer was inserted into a Mo-on-Si interface to enhance the extreme ultraviolet
(EUV) re
ective multilayer properties. The stacking status and the optical properties were analyzed
using cross-sectional transmission electron microscopy (...
Ru interfacial layer was inserted into a Mo-on-Si interface to enhance the extreme ultraviolet
(EUV) re
ective multilayer properties. The stacking status and the optical properties were analyzed
using cross-sectional transmission electron microscopy (TEM), X-ray diraction (XRD), and a
re
ectometer. About 1.5 % improvement of the maximum reflectivity can be acquired as predicted
by an optical simulation, which is thought to originate from the diffusion-inhibition property.