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https://www.riss.kr/link?id=O39195940
1999년
eng
학술저널
INTERNATIONAL CONFERENCE ON MICRO OPTO ELECTRO MECHANICAL SYSTEMS
140-144 [※수록면이 p5 이하이면, Review, Columns, Editor's Note, Abstract 등일 경우가 있습니다.]
Micro opto electro mechanical systems
International conference; 3rd
Third international conference on micro opto electro mechanical systems
Mainz, Germany
1999; Aug
0
상세조회0
다운로드
Opportunities for MEMS in Lightwave Networks
A Novel Electrostatically Driven Torsional Actuator
Viscous Damping of On-Substrate Torsional Micromirrors
2-DOF Actuated Micromirror Designed for Large DC Deflection