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      Design and Fabrication of Hyperabrupt Varactor Diode on GaAs substrate

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      https://www.riss.kr/link?id=A82540403

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      In this paper, we have designed and fabricated hyperabrupt varactor diodes. Capacitance variations of hyperabrupt-doped varactor diodes are larger than those of uniform-doped varactor diodes. We adopted sensitivity S for the design of the hyperabrupt varactor diodes. The large S means the larger capacitance variations with biasing voltages. The measured reverse breakdown voltage of the fabricated varactor diodes was about 20 V. Also, the leakage current was 13 ㎁ at 20 V of reverse bias. The ideality factor was 1.15 at 300 K. For the anode contact diameter of 50 ㎛, the maximum capacitance of the fabricated varactor diode was 2.1 pF and the minimum capacitance 0.44 ㎊. Therefore, the Cmax/Cmin ratio was 4.77. Also, for the anode contact diameter of 60 ㎛, the maximum and minimum capacitances were 2.9 and 0.62 ㎊, respectively. And, thus, the Cmax/Cmin ratio was 4.64. The sensitivity of the fabricated varactor diodes (D=60 ㎛) was 2.37.
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      In this paper, we have designed and fabricated hyperabrupt varactor diodes. Capacitance variations of hyperabrupt-doped varactor diodes are larger than those of uniform-doped varactor diodes. We adopted sensitivity S for the design of the hyperabrupt ...

      In this paper, we have designed and fabricated hyperabrupt varactor diodes. Capacitance variations of hyperabrupt-doped varactor diodes are larger than those of uniform-doped varactor diodes. We adopted sensitivity S for the design of the hyperabrupt varactor diodes. The large S means the larger capacitance variations with biasing voltages. The measured reverse breakdown voltage of the fabricated varactor diodes was about 20 V. Also, the leakage current was 13 ㎁ at 20 V of reverse bias. The ideality factor was 1.15 at 300 K. For the anode contact diameter of 50 ㎛, the maximum capacitance of the fabricated varactor diode was 2.1 pF and the minimum capacitance 0.44 ㎊. Therefore, the Cmax/Cmin ratio was 4.77. Also, for the anode contact diameter of 60 ㎛, the maximum and minimum capacitances were 2.9 and 0.62 ㎊, respectively. And, thus, the Cmax/Cmin ratio was 4.64. The sensitivity of the fabricated varactor diodes (D=60 ㎛) was 2.37.

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      목차 (Table of Contents)

      • Abstract
      • 1. Introduction
      • 2. Design of Hyperabrupt varactor diode
      • 3. Fabrication of the varactor diode
      • 4. Results and Discussion
      • Abstract
      • 1. Introduction
      • 2. Design of Hyperabrupt varactor diode
      • 3. Fabrication of the varactor diode
      • 4. Results and Discussion
      • 5. Conclusions
      • Acknowledgments
      • References
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