The silicon oxide films were grown by Electron Cyclotron Resonance(ECR) diffusion and CVD method at low temperature. The flatband voltage(V_(FB)) was minimum at 200W, and reached a steady value at microwave powers higher than 400W. Also The flatband v...
The silicon oxide films were grown by Electron Cyclotron Resonance(ECR) diffusion and CVD method at low temperature. The flatband voltage(V_(FB)) was minimum at 200W, and reached a steady value at microwave powers higher than 400W. Also The flatband voltage(V_(FB)) was proportional to interface oxide charge density(Q_(it)+Q_f). For high quality SiO₂ film, consequently, it was desirable to grow SiO₂ films at lower microwave power.