PCB기판에 임베디드 된 페라이트 필름 인덕터

다국어 초록 (Multilingual Abstract)

Recently, It has been reported that the spin sprayed ferrite film shows better magnetic properties at high frequency than the ferrite by co-firing over 800℃. Besides, there is no limitation to select the substrate materials because it can be processed with relatively low temperature below 100℃. Therefore, we fabricated film inductor as a passive device for DC-DC converter by a use of spin sprayed Ni-Zn ferrite film on the polyimide layer without insulating layer. After cover-lay film was laminated on the top of that finally, embedded form was completed by via hole process of pad opening. Saturation magnetization of 0.61 T and real part of permeability of 110 were obtained in Ni-Zn ferrite. In addtion, inductance of 1.52 μH, quality factor of 24.3 at 5 ㎒ were measured with spiral 16 turn inductor. The rated current of inductor was 863 ㎃.

참고문헌 (Reference)

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