In this paper, we study electrical property of indium gallium zinc oxide (IGZO) by varying composition ratio and precursor material of IGZO solution. IGZO film is deposited by sol-gel process, and the film is analyzed by measuring I-V curve using prob...
In this paper, we study electrical property of indium gallium zinc oxide (IGZO) by varying composition ratio and precursor material of IGZO solution. IGZO film is deposited by sol-gel process, and the film is analyzed by measuring I-V curve using probe station in direct contact. Our result show that the higher ratio of indium in the solution, the greater reactivity to voltage. Also, the solution composed of Zinc nitrate hydrate has a higher voltage response than the solution composed of Zinc acetate dihydrate.