전해 방전법을 이용한 유리 미세 구멍가공 = Sensor Materials, Processes and Others ; Micro-hole Fabrication of Glass Using Electro-chemical Discharge Method

다국어 초록 (Multilingual Abstract)

In this paper, we fabricated an apparatus of the electro-chemical discharge drilling for boring narrow through-hole into a glass. In the electrolyte, electro-chemical discharge creates high temperature condition by the electro-discharge energy. Therefore, glass are removed by the accelerated chemical reaction with glasses and chemicals in the high temperature condition. For optimization of the electro-chemical discharge drilling, the process condition was studied experimentally as a function of the electrolyte concentration, supply voltage and process time. The optimum condition was from DC25V to DC30V of applied voltage, 35 wt% NaOH solution.

참고문헌 (Reference)

1 이영태, "Stereolithography 기술을 이용한 마이크로 펌프 제작" 10 (10): 232-238, 2001.

2 S. Shoji, "Photoetching and electrochemical discharge drilling of pyrex glass" 27-30, 1990.

3 이영태, "Micro-stereolithography 기술을 이용한 용액분석 소자 제작" (14) : 994 -1000,

4 T. Hirogaki,, "Laser drilling of blind via holes in aramid and glass/epoxy composites for multi-layer printed wiring boards" 32 : 963-968, 2001.

5 D.C. Hamilton, "Hole drilling studies with a variable pulse length CO2 laser" 11 : pp.183~1881979.

6 K. Ishikawa,, "A study on combined vibration drilling by ultrasonic and low-frequency vibrations for hard and brittle materials" 22 : 196-205, 1998.

7 Y. Wang, "A novel electrostatic servo capacitive vacuum sensor" 1457-1460, 1997.