변위증폭형 변위측정계가 포함된 나노스테이지

다국어 초록 (Multilingual Abstract)

This paper describes the development of a nano-positioning system for high precision machining and measuring System. Conventional positioning systems, which can be expensive and complicated, require the use of laser interferometers or capacitive transducers to measure nanoscale displacements of the stage. In this study, a new nano stage with displacement amplifying type displacement measuring instrument was developed using mechanical magnification of its displacement signal. The nano stage with displacement amplifying type displacement measuring instrument measured the displacement of its movement using a lever mechanism and capacitive transducers. When stage moves, the lever mechanism magnifies stage's displacement. Finally, the capacitive transducers measured the magnified displacement as opposed to the actual movement of the stage via an mechanical lever mechanism, providing the ability to more precisely control the nanoscale stage.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. 변위증폭형 변위측정계
• 3. 기계적 변위증폭형 스테이지의 제작 및 특성 평가
• 4. 결론
• 후기
• 참고문헌