Wear Characteristics of Atomic Force Microscopy Tips: A Reivew

다국어 초록 (Multilingual Abstract)

Based on the interaction between the extremely sharp tip and the sample, atomic force microscopy (AFM) has been widely utilizedto explore the surface phenomena at the nano-scale. During the AFM measurements such as topographical imaging, forcespectroscopy, and friction loop, the tip is often damaged due to wear, which in turn forms the artifacts in the AFM images and increasethe uncertainties of material properties measured by an AFM. In this paper, based on the numerous studies performed by researchers,the wear characteristics of silicon- and carbon-based tips, and metal coated tips are comprehensively reviewed, including thecharacterization methods and models for tip wear, with an aim to provide an overview of key findings of tip wear that can be usefulfor AFM scientists and engineers.

참고문헌 (Reference)

1 Fletcher, P. C., "Wear-Resistant Diamond Nanoprobe Tips with Integrated Silicon Heater for Tip-based Nanomanufacturing" 4 (4): 3338-3344, 2010

2 Khurshudov, A., "Wear of the Atomic Force Microscope Tip under Light Load, Studied by Atomic Force Microscopy" 60 (60): 11-16, 1995

3 Geiss, R. H., "Wear of Si Cantilever Tips used in Atomic Force Acoustic Microscopy" 11 (11): 364-365, 2005

4 Lantz, M. A., "Wear Resistant Nanoscale Silicon Carbide Tips for Scanning Probe Applications" 22 (22): 1639-1645, 2012

5 Chung, K. H, "Wear Characteristics of Diamond-Coated Atomic Force Microscope Probe" 108 (108): 1-10, 2007

6 Pérez-Murano, F., "Voltage Modulation Scanned Probe Oxidation" 75 (75): 199-201, 1999

7 Bhushan, B., "Velocity Dependence of Nanoscale Wear in Atomic Force Microscopy" 91 (91): 2007

8 Bhaskaran, H., "Ultralow Nanoscale Wear through Atom-by-Atom Attrition in Silicon-Containing Diamond-Like Carbon" 5 (5): 181-185, 2010

9 Chung, K. H., "Tribological Characteristics of Probe Tip and PZT Media for AFMbased Recording Technology" 41 (41): 849-854, 2005

10 Mamin, H. J, "Thermomechanical Writing with an Atomic Force Microscope Tip" 61 (61): 1003-1005, 1992

11 Archard, J. F, "The Wear of Metals under Unlubricated Conditions,”" 236 (236): 397-410, 1956

12 Johnson, K. L., "Surface Energy and the Contact of Elastic Solids" 324 (324): 301-313, 1971

13 Hafner, J. H., "Structural and Functional Imaging with Carbon Nanotube AFM Probes" 77 (77): 73-110, 2001

14 Maw, W., "Single Asperity Tribochemical Wear of Silicon Nitride Studied by Atomic Force Microscopy" 92 (92): 5103-5109, 2002

15 Carpick, R. W., "Scratching the Surface : Fundamental Investigations of Tribology with Atomic Force Microscopy" 97 (97): 1163-1194, 1997

16 Quinn, T. F. J., "Review of Oxidational Wear: Part I: The Origins of Oxidational Wear" 16 (16): 257-271, 1983

17 Quinn, T. F. J., "Review of Oxidational Wear Part II : Recent Developments and Future Trends in Oxidational Wear Research" 16 (16): 305-315, 1983

18 Evans, A. G, "Quasi-Static Solid Particle Damage in Brittle Solids-I. Observations Analysis and Implications" 24 (24): 939-956, 1976

19 Bhushan, B, "Principles and Applications of Tribology" Jon Wiley & Sons 1999

20 Liu, J., "Preventing Nanoscale Wear of Atomic Force Microscopy Tips through the Use of Monolithic Ultrananocrystalline Diamond Probes" 6 (6): 1140-1149, 2010

21 Ravi, T., "Oxidation Sharpening of Silicon Tips" 9 (9): 2733-2737, 1991

22 Muller, V. M., "On Two Methods of Calculation of the Force of Sticking of an Elastic Sphere to a Rigid Plane" 7 (7): 251-259, 1983

23 Bhushan, B., "Noble Metal-Coated Probes Sliding at up to 100 mm s-1 Against PZT Films for AFM Probe-based Ferroelectric Recording Technology" 20 (20): 2008

24 Dai, H., "Nanotubes as Nanoprobes in Scanning Probe Microscopy" 384 (384): 147-150, 1996

25 Bhushan, B., "Nanotribology and Nanomechanics of Afm Probe-based Data Recording Technology" 20 (20): 2008

26 Jacobs, T. D., "Nanoscale Wear as a Stress-Assisted Chemical Reaction" 8 (8): 108-112, 2013

27 Tambe, N. S, "Nanoscale Friction and Wear Maps" 366 (366): 1405-1424, 2008

28 Chung, K. H., "Nanomechanical Properties of Thin Films of Type I Collagen Fibrils" 26 (26): 3629-3636, 2010

29 Giesbers, A. J. M., "Nanolithography and Manipulation of Graphene using an Atomic Force Microscope" 147 (147): 366-369, 2008

30 김해진, "Nano-scale Wear: A Review" 한국정밀공학회 13 (13): 1709-1718, 2012

31 Khurshudov, A. G., "Nano-Wear of the Diamond AFM Probing Tip under Scratching of Silicon, Studied by AFM" 2 (2): 345-354, 1996

32 Chung, K. H., "Nano-Tribological Characteristics of PZT Thin Film Investigated by Atomic Force Microscopy" 201 (201): 7983-7991, 2007

33 Chung, K. H., "Nano-Tribological Characteristics of PZT Thin Film Investigated by Atomic Force Microscopy" 201 (201): 7983-7991, 2007

34 김대은, "Nano-Mechanical and Tribological Characteristics of Ultra- Thin Amorphous Carbon Film Investigated by AFM" 대한기계학회 18 (18): 1772-1781, 2004

35 Wolter, O., "Micromachined Silicon Sensors for Scanning Force Microscopy" 9 (9): 1353-1357, 1991

36 Folch, A., "Microfabrication of Oxidation-Sharpened Silicon Tips on Silicon Nitride Cantilevers for Atomic Force Microscopy" 6 (6): 303-306, 1997

37 Albrecht, T. R, "Microfabrication of Cantilever Styli for the Atomic Force Microscope" 8 (8): 3386-3396, 1990

38 Sung, I. H., "Micro/Nano-Tribological Characteristics of Self-Assembled Monolayer and Its Application in Nano-Structure Fabrication" 255 (255): 808-818, 2003

39 Liu, J., "Method for Characterizing Nanoscale Wear of Atomic Force Microscope Tips" 4 (4): 3763-3772, 2010

40 Filippov, A. E., "Mechanism of Wear and Ripple Formation Induced by the Mechanical Action of an Atomic Force Microscope Tip" 106 (106): 2011

41 Kim, Y., "Machining Oxide Thin Films with an Atomic Force Microscope : Pattern and Object Formation on the Nanometer Scale" 257 (257): 375-377, 1992

42 Merkle, A. P., "Liquid-Like Tribology of Gold Studied by in Situ TEM" 265 (265): 1864-1869, 2008

43 Evans, A. G, "Fundamentals of Friction and Wear of Meaterials" American Society for Metals 1981

44 Chung, K. H., "Fundamental Investigation of the Wear Progression of Silicon Atomic Force Microscope Probes" 52 (52): 315-325, 2013

45 Chung, K. H, "Fundamental Investigation of Micro Wear Rate using an Atomic Force Microscope" 15 (15): 135-144, 2003

46 Chung, K. H., "Frictional Properties of Native and Functionalized Type I Collagen Thin Films" 103 (103): 2013

47 Rabinowicz, E, "Friction and Wear of Materials" Wiley 128-132, 1995

48 Marcus, R., "Formation of Silicon Tips with < 1 nm Radius" 56 (56): 236-238, 1990

49 Schaefer, D. M., "Fabrication of TwoDimensional Arrays of NanometerSize Clusters with the Atomic Force Microscope" 66 (66): 1012-1014, 1995

50 Dongmo, L. S., "Experimental Test of Blind Tip Reconstruction for Scanning Probe Microscopy" 85 (85): 141-153, 2000

51 Archard, J. F., "Elastic Deformation and the Laws of Friction" 243 (243): 190-205, 1957

52 Derjaguin, B. V., "Effect of Contact Deformations on the Adhesion of Particles" 53 (53): 314-326, 1975

53 Dagata, J. A., "Device Fabrication by Scanned Probe Oxidation" 270 (270): 1625-1625, 1995

54 Bloo, M. L., "Deformation and Wear of Pyramidal, Silicon-Nitride AFM Tips Scanning Micrometre-Size Features in Contact Mode" 25 (25): 203-211, 1999

55 Killgore, J. P., "Continuous Measurement of Atomic Force Microscope Tip Wear by Contact Resonance Force Microscopy" 7 (7): 1018-1022, 2011

56 Kopycinska-Müller, M., "Contact Mechanics and Tip Shape in AFM-based Nanomechanical Measurements" 106 (106): 466-474, 2006

57 Johnson, K. L., "Contact Mechanics" Cambridge University Press 1985

58 Larsen, T., "Comparison of Wear Characteristics of Etched-Silicon and Carbon Nanotube Atomic-Force Microscopy Probes" 80 (80): 1996-1998, 2002

59 Lantz, M. A., "Characterization of Tips for Conducting Atomic Force Microscopy in Ultrahigh Vacuum" 69 (69): 1757-1764, 1998

60 O’Shea, S., "Characterization of Tips for Conducting Atomic Force Microscopy" 66 (66): 2508-2512, 1995

61 Chung, K. H., "Characteristics of Fracture during the Approach Process and Wear Mechanism of a Silicon AFM Tip" 102 (102): 161-171, 2005

62 Wilson, N. R, "Carbon Nanotube Tips for Atomic Force Microscopy" 4 (4): 483-491, 2009

63 Tian, F., "Blind Estimation of General Tip Shape in AFM Imaging" 109 (109): 44-53, 2008

64 Willemsen, O. H., "Biomolecular Interactions Measured by Atomic Force Microscopy" 79 (79): 3267-3281, 2000

65 Gotsmann, B, "Atomistic Wear in a Single Asperity Sliding Contact" 101 (101): 2008

66 Terris, B. D., "Atomic Force Microscope-based Data Storage : Track Servo and Wear Study" 66 (66): S809-S813, 1998

67 Binnig, G., "Atomic Force Microscope" 56 (56): 930-933, 1986

68 Tayebi, N., "An Ultraclean Tip-Wear Reduction Scheme for Ultrahigh Density Scanning Probe-based Data Storage" 4 (4): 5713-5720, 2010

69 Colaço, R., "An AFM Study of Single-Contact Abrasive Wear : The Rabinowicz Wear Equation Revisited" 267 (267): 1772-1776, 2009

70 Villarrubia, J. S., "Algorithm for Scanned Probe Microscope Image Simulation, Surface Reconstruction, and Tip Estimation" 102 (102): 425-454, 1997

71 Maugis, D., "Adhesion of Spheres : The JKR-DMT Transition using a Dugdale Model" 150 (150): 243-269, 1992

72 Katsuki, F., "AFM Studies on the Difference in Wear Behavior Between Si and SiO2 in KOH Solution" 147 (147): 2328-2331, 2000