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9 Weckenmann,A, "Probing systems in dimensional metrology" 53 (53): 657-684, 2004
10 Gao,W, "Precision nano-fabrication and evaluation of a large sinusoidal grid surface for a surface encoder" 27 (27): 289-298, 2003
1 Tian,Y, "Vibration analysis of stylus instrument for random surface measurement" 34 (34): 586-591, 2010
2 "Toshiba Machine Co. Ltd"
3 Chen,C.-C.A, "Tool path generation for diamond shaping of aspheric lens array" 192 (192): 194-199, 2007
4 Sherrington,I, "The significance of surface topography in engineering" 8 (8): 79-87, 1986
5 "Taylor Hobson Co. Ltd"
6 Childs,T.H.C, "Surface finishes from turning and facing with round nosed tools" 57 (57): 89-92, 2008
7 "RENISHAW Co.Ltd"
8 Atsushi Shibuya, "Profile Measurements of Micro-aspheric Surfaces Using an Air-bearing Stylus with a Microprobe" 한국정밀공학회 8 (8): 26-31, 2007
9 Weckenmann,A, "Probing systems in dimensional metrology" 53 (53): 657-684, 2004
10 Gao,W, "Precision nano-fabrication and evaluation of a large sinusoidal grid surface for a surface encoder" 27 (27): 289-298, 2003
11 Gao,W, "Precision and fast measurement of 3D cutting edge profiles of single point diamond microtools" 58 (58): 451-454, 2009
12 Gao,W, "On-machine measurement of a cylindrical surface with sinusoidal microstructures by an optical slope sensor" 30 (30): 274-279, 2006
13 Gao,W, "Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor" 30 (30): 396-405, 2006
14 "Kyowa Co. Ltd"
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16 Noh,Y.J, "Improvement of a fast tool control unit for cutting force measurement in diamond turning of micro-lens array" 3 (3): 227-241, 2009
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18 박천홍, "Development of an Ultra Precision Machine Tool for Micromachining on Large Surfaces" 한국정밀공학회 10 (10): 85-91, 2009
19 Patterson,S.R, "Design and testing of a fast tool servo for diamond turning" 7 (7): 123-128, 1985
20 Kong,L.B, "Characterization of surface generation of optical microstructures using a pattern and feature parametric analysis method" 34 (34): 755-766, 2010
21 Dow,T.A, "Application of a fast tool servo for diamond turning of nonrotationally symmetric surfaces" 13 (13): 243-250, 1991
22 Bruzzone,A.A.G, "Advances in engineered surfaces for functional performance" 57 (57): 750-769, 2008
23 Hwang,J.H, "A threeprobe system for measuring the parallelism and straightness of a pair of rails for ultra-precision guideways" 47 (47): 1053-1058, 2007
24 Okazaki,Y, "A micro-positioning tool post using a piezoelectric actuator for diamond turning machines" 12 (12): 151-156, 1990
25 Noh,Y.J, "A force sensor integrated fast tool control system" 77 (77): 85-89, 2011
26 Miller,M.H, "A controller architecture for integrating a fast tool servo into a diamond turning machine" 16 (16): 42-48, 1994